Permanent-magnet dimagnetic combined suspension rotor micro gyroscope

Abstract

A permanent-magnet-medium-magnetic combined levitation rotor micro-gyroscope in the field of micro-electromechanical technology, comprising: an upper stator, a support ring, a lower stator, and a rotor. The upper stator is provided with a dielectric material layer, and an insulating support layer is provided on the upper surface of the dielectric material layer. A common electrode is arranged at the center of the outer surface of the insulating support layer, and 8 sector-shaped detection plus moment electrodes and 18 sector-shaped rotating electrodes are arranged sequentially on the outer surface of the insulating support layer from inside to outside, and a permanent magnet material layer is arranged on the lower surface of the dielectric material layer; The lower stator is provided with a dielectric material layer, an insulating support layer is provided on the dielectric material layer, a common electrode is provided at the center of the upper outer surface of the insulating support layer, and 8 sector-shaped detection and moment-adding electrodes are arranged sequentially on the outer surface of the insulating support layer from the inside to the outside , 18 sector-shaped rotating electrodes; the rotor is an external toothed rotor or an internal toothed rotor. The invention has low power consumption, small size, integrated manufacturing using micro-processing technology, no need for manual assembly, greatly improves the reliability of the device, and has the characteristics of low cost and batch production.

Description

technical field [0001] The invention relates to a device in the field of micro-electromechanical technology, in particular to a permanent-magnet-medium-magnetic combination levitation rotor as a gyroscope. Background technique [0002] Micro-mechanical gyroscopes are the product of the combination of MEMS (micro-electromechanical systems) technology and gyroscope technology, and there are two types: vibration type and suspended rotor type. The vibrating micro-gyroscope works using the Coriolis effect, and the size is within a few millimeters. The detection quality of the vibrating micro-gyroscope is connected to the substrate through a mechanical structure. Due to its own limitations and some difficulties in micro-processing, the drift accuracy is at a low-to-medium level. . The suspended rotor micro-gyroscope uses electromagnetic force or electrostatic force to separate the detection micro-rotor from the substrate, and its drift accuracy can reach the inertial level. [0...

AI Technical Summary

Problems solved by technology

[0004] Although the suspension rotor design scheme of Joe Nhut Ho of the University of Washington in the United States can realize the suspension and rotation of the rotor, there are several shortcomings and shortcomings in order to become a gyroscope, especially a micro-gyroscope using micro-processing technology: 1) The design scheme has no sensor , essentially cannot constitute a gyro sensor

2) Suspension and rotation both use electromagnetic fields, so suspension and rotation interfere with each other, and the stability of suspension and rotation becomes poor. It has a principle defect to become a gyroscope

3) The rotor adopts an equilateral triangle structure, and permanent magnets are arranged at the three vertices of the triangle. The arbitrary radial moments of inertia of the plane perpendicular to the inertial axis of this structure are not equal, which is very unfavorable for the realization of the gyro function

4) AC current is passed through the rotating drive coil, and the heating phenomenon is relatively serious

5) The design includes a spatially complex arrangement of drive coils, which is not convenient for micromachining, and is limited in mass production and cost reduction

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