Panel display device with knot type field effect tube cathodic control array structure and its production technique

Abstract

The invention particularly relates to a flat panel display with a junction field effect tube cathode control array structure and its manufacturing process, including a sealed vacuum chamber formed by a cathode glass panel, an anode glass panel and surrounding glass frames; on the anode glass panel There is a photolithographic anode conductive layer and a phosphor layer prepared on the anode conductive layer; there are prepared carbon nanotube cathodes, control grids and junction field effect tube cathode control array structures on the cathode glass panel; located on the anode glass panel The support wall structure between the cathode glass panel and the accessory component of the getter is used to adjust the electron emission ability of the corresponding carbon nanotube cathode under the pixel point, so that it can emit a large amount of electrons uniformly and stably; it is beneficial to reduce the operating voltage of the device, The method improves the success rate of device fabrication, and has the advantages of stable and reliable fabrication process, simple fabrication process, low fabrication cost and simple structure.

Description

technical field [0001] The present invention belongs to the fields of vacuum science and technology, microelectronic science and technology, plane display technology and nanometer science and technology, and relates to the fabrication of devices for flat panel field emission displays, in particular to flat panel field emission of carbon nanotube cathodes The content of the device production of the display, especially related to the device production and production process of the flat field emission display with the cathode control structure of the junction field effect tube and the carbon nanotube cathode. Background technique [0002] Carbon nanotubes have a small tip curvature radius, high aspect ratio, and good electrical conductivity. They can emit a large number of electrons under the action of an applied voltage. They have unique field emission characteristics and have attracted the attention of many researchers. . For flat field emission flat panel display devices us...

AI Technical Summary

Problems solved by technology

Affected by various external factors, the field emission capabilities of different carbon nanotube cathodes will be different, resulting in different luminescence levels of the corresponding luminescent pixels, which will adversely affect the display image quality

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