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Pland display having umbrella-shaped grid array structure and its manufacturing technology

A technology of flat panel display and array structure, which is applied in the direction of image/graphic display tube, cold cathode manufacturing, electrode system manufacturing, etc. It can solve the problems of high control grid voltage and large grid current, and achieve lower operating voltage and higher display Brightness, the effect of improving the success rate of production

Inactive Publication Date: 2009-10-28
ZHONGYUAN ENGINEERING COLLEGE
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The strong control effect of this gate structure is obvious, and the manufacturing process is relatively simple, but the formed gate current is relatively large, and the control gate voltage is relatively high, which is its disadvantage.

Method used

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  • Pland display having umbrella-shaped grid array structure and its manufacturing technology
  • Pland display having umbrella-shaped grid array structure and its manufacturing technology
  • Pland display having umbrella-shaped grid array structure and its manufacturing technology

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited to these embodiments.

[0033] The present invention comprises a sealed vacuum chamber formed by a cathode panel 1, an anode panel 11 and surrounding glass enclosures 8; an anode conductive layer 12 photoetched on the anode panel 11 and a phosphor layer 14 prepared on the anode conductive layer 12 ; The supporting wall structure 9 and the accessory element 10 of the getter are fabricated on the cathode panel 1 with an umbrella-shaped grid array structure.

[0034] The umbrella gate structure includes a cathode panel 1, a gate conductive layer 2 arranged on the cathode panel 1, and a doped polysilicon layer 3 arranged on the gate conductive layer 2, wherein the shape of the doped polysilicon layer 3 is An umbrella structure, the insulating isolation layer 4 after etching covers all the doped polysilicon layer 3, the...

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Abstract

The invention particularly relates to a flat panel display with an umbrella grid array structure and its manufacturing process. The flat panel display with an umbrella grid array structure includes a sealed vacuum chamber composed of a cathode panel, an anode panel and surrounding glass frames. ; On the anode panel, there is a photolithographic anode conductive layer and a phosphor layer prepared on the anode conductive layer; the support wall structure and the accessory components of the getter are made on the cathode panel with an umbrella-shaped grid array structure. On the basis of the good field emission characteristics of the carbon nanotube cathode prepared by the growth method, the control of the electron emission of the carbon nanotube cathode is further strengthened; the working voltage of the device is reduced, and the electron emission efficiency of the carbon nanotube cathode is improved , has the advantages of stable and reliable manufacturing process, simple manufacturing process, low manufacturing cost and simple structure.

Description

technical field [0001] The invention belongs to the fields of plane display technology, microelectronic science and technology, vacuum science and technology, and nano science and technology, and relates to the manufacture of flat panel field emission displays, in particular to flat panels for carbon nanotube cathodes. The content of device fabrication of field emission display, especially related to the fabrication process of field emission flat display device with umbrella grid array structure and carbon nanotube cathode. Background technique [0002] Carbon nanotube is a coaxial tubular substance that can emit a large number of electrons under the action of an applied voltage. It has a small tip curvature radius, high aspect ratio, good field emission characteristics and excellent physical and chemical stability. Sex, is a very good cold cathode emission material, has attracted the attention of many researchers. The flat panel display using carbon nanotubes as the cathod...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J29/02H01J29/04H01J31/12H01J9/00
Inventor 李玉魁
Owner ZHONGYUAN ENGINEERING COLLEGE
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