Semiconductor device and manufacturing method thereof
A manufacturing method and semiconductor technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve problems such as the inability to reduce the resistance value of semiconductor devices, and achieve the effect of improving equipment characteristics
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[0032] Here, the semiconductor device of the present invention will be described by taking an upper-drain type MOS transistor with a trench structure as an example.
[0033] First, if figure 1 As shown, an N-type epitaxial layer 2 is formed on a semiconductor substrate 1 composed of one conductivity type such as N-type silicon, and a P-type diffusion layer 3 (channel region CH) is formed on the surface of the epitaxial layer 2 . In addition, in this embodiment, for example, the thickness of the epitaxial layer 2 is 10 μm, the thickness of the semiconductor substrate 1 including the thickness of the epitaxial layer 2 is 200 μm, and the thickness of the P-type diffusion layer 3 is 1 to 1.5 μm.
[0034] In addition, a groove 4 is formed at a predetermined depth from the P-type diffusion layer 3 to the above-mentioned epitaxial layer 2 . A conductive layer composed of a polysilicon film surrounded by an insulating film 5 is embedded in the trench 4 to form a gate electrode (G) 6...
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