Vacuum coating method and system

Abstract

A method and system relates to vacuum coating. The method is: putting the uncoated material into the coating chamber through several vacuum chambers and an input channel of the coating chamber in turns from the air environment for coating, moving to the output channel of the coating chamber with a shifting device, shifting into the air environment through several vacuum chambers and an input channel of the coating chamber. The system comprises several vacuum chambers and a coating chamber. A vacuum valve is set in the two close environments of atmosphere, vacuum and coating chambers. The vacuum and coating chambers has two channels, one is an input channel and the other is output channel. A shift device, which shifts the material from the end of the input channel into the end of the outputchannel, is set in the coating chamber. The invention has the advantages of low cost, high equipments availability, high reliability, and high practicability.

Description

technical field [0001] The invention relates to coating, in particular to a vacuum coating method and system. Background technique [0002] The continuous vacuum coating method separates the two steps of vacuuming and coating by connecting several vacuum chambers in series, and further subdivides each of them into several sub-steps of vacuuming and coating. A batch of samples can be vacuumed in different vacuum chambers at the same time, thereby greatly reducing the time spent in the vacuuming process, reducing the coating cycle of the item, and realizing continuous vacuum coating. [0003] Ordinary continuous vacuum coating has two basic features. One is that it has several vacuum chambers, which are located on both sides of the vacuum coating chamber and are usually symmetrically arranged relative to the vacuum coating chamber. The purpose of these vacuum chambers is to vacuum and The input and output of the atmosphere transition; the second is the unidirectionality of th...

AI Technical Summary

Problems solved by technology

[0005] (1) The equipment cost of the coating device is high. In addition to the coating chamber, the coating device also needs several vacuum chambers before and after. Each additional vacuum chamber and supporting equipment required for vacuuming will increase the cost of equipment and the corresponding Operation and maintenance cost

[0006] (2) It occupies a large area. The coating device is composed of several closed vacuum chambers connected in series. The more vacuum chambers, the larger the area occupied

[0007] (3) The existing technology does not make full use of all the vacuum chambers, and the vacuum degree and atmosphere of each vacuum chamber are not the same, so each time when transporting items between adjacent chambers, the vacuum chambers can only be placed in groups of two communication, which results in coating items in the two connected chambers, and no coating items in the other chamber, which is a waste of vacuum resources

[0008] Therefore, the existing technology has high cost and low equipment utilization

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