Detecting method for position of photomask graphics
A detection method and photomask technology, which are applied to the photoengraving process of the pattern surface, the originals for photomechanical processing, the exposure device of the photoengraving process, etc., can solve the problem of high risk of time-consuming and undetected, Achieve the effect of improving detection efficiency and detection accuracy, saving economic costs and reducing detection costs
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[0035] In order to better illustrate the present invention, the following further describes the present invention with reference to the accompanying drawings and embodiments.
[0036] The invention makes full use of computer software and hardware resources and the photomask layout and photomask frame generated in the computer to process graphics and data through the computer to achieve the purpose of computer automatic detection, so as to improve detection efficiency and detection accuracy. The position detection of the photomask pattern of the present invention is mainly divided into the following two parts: the first part is to detect whether there is an overlap between the frame pattern and the filling pattern on the photomask layout; the second part is to detect the photomask layout Whether there are overlaps or gaps between the filled graphics and the filled graphics.
[0037] In the first part of the photomask pattern position detection, since the frame pattern of the photom...
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