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An integrated crystalline silicon solar cell and its manufacturing method

A technology of crystalline silicon solar cells and solar cells, which is applied in semiconductor/solid-state device manufacturing, circuits, photovoltaic power generation, etc., can solve problems such as poor compatibility, productization gap, and complicated process, and achieve good compatibility and ingenious design , The effect of simple process

Inactive Publication Date: 2012-02-01
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

That is, the grid wire electrodes of the solar cell are all on the illuminated surface, and the connection of each solar cell monomer is also completed on the illuminated surface. The electrode shading area is relatively large, and at the same time, the collection efficiency of photogenerated carriers is not high, which leads to the low overall energy conversion efficiency of the solar cell.
At the same time, there are problems such as complex process and poor compatibility, and there is still a big gap from productization

Method used

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  • An integrated crystalline silicon solar cell and its manufacturing method
  • An integrated crystalline silicon solar cell and its manufacturing method
  • An integrated crystalline silicon solar cell and its manufacturing method

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with accompanying drawing and specific embodiment:

[0019] figure 1 Shown is the integrated solar cell structure of the present invention. The solar cell grid electrode and the on-chip integrated circuit are on the same side, and each sub-cell (that is, the solar cell monomer) is formed by deep trench insulation isolation, which avoids the mutual crosstalk of each sub-cell, and can freely build a series / parallel structure according to needs .

[0020] Shown in Fig. 2 is the manufacturing process flow of the present invention.

[0021] Step 1: According to the designed layout, the standard integrated circuit manufacturing process is used to tape out, such as Figure 2a The integrated chip before the subsequent process shown is cleaned with a special electronic cleaning solution to remove surface impurities;

[0022] Step 2: If Figure 2b As shown, the front of the chip is bonded to a clean thin gl...

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Abstract

A method for preparing integrated crystal-silicon solar cell includes setting electrode at back of solar cell; arranging gate line electrode of solar cell at the same side with integrated circuit; finishing partial structure of solar cell together with integrated circuit by utilizing standard integrated circuit preparing process then using photo-etching, corrosion, metal deposition and SiNx precipitation to process said solar cell together with integrated circuit component to obtain crystal-silicon solar cell integrated product.

Description

technical field [0001] The invention relates to an integrated crystalline silicon solar cell and a manufacturing method thereof Background technique [0002] In recent years, with the rapid development of micro-electromechanical systems (MEMS) technology, sensors have entered the stage of micro-sensors and micro-systems from traditional mechanical structures, and are developing in the direction of miniaturization, integration, intelligence, and systemization. With the development of micro-sensing technology, microelectronics technology and its integration technology, the volume of the system is rapidly and greatly reduced. The traditional power supply method and its control system have seriously restricted the further development of this type of autonomous sensing system to a high degree of integration. Solar cells can directly convert solar energy into electrical energy, and have the advantages of being quiet, reliable, and maintenance-free. Among them, crystalline silicon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/142H01L21/84
CPCY02E10/50
Inventor 孙红光李艳秋尚永红于红云苏波
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI