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Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof

A technology of electron microscope and microreactor, which is applied in the direction of electrical components, circuits, discharge tubes, etc., and can solve problems such as insufficient clear images and inability to control temperature

Active Publication Date: 2007-10-17
TECH UNIV DELFT +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The specimen chamber also has a disadvantage, especially for small specimens, resulting in insufficiently sharp images
[0007] These known specimen holders all have a limited field of application, with which insufficiently sharp images may be obtained
In addition, the temperature cannot be controlled in

Method used

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  • Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof
  • Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof
  • Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof

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Embodiment Construction

[0040] In this description a microreactor will be shown, which basically consists of two building blocks. These building parts are called "chips" because they are basically manufactured using chip technology. However, these building parts can also be formed in different ways.

[0041]FIG. 1 shows a cross-sectional view of a microreactor 1 according to the invention, which comprises a first chip 2 and a second chip 3 . In FIG. 1 , the first chip 2 is located at the bottom and comprises, in addition to a central recess 6 , an inlet 4 and an outlet 5 . The top chip 3 , opposite the central groove 6 , comprises a similar groove 7 . The chips 2, 3 form frame-shaped support members 50 around the grooves 6, 7 and peripheral annular spacers 9 on the opposite sides. The spacers 9 are fixed against each other, for example by gluing, clamping or any other suitable technique. In the recesses 6, 7, heating coils 8 are visible, which will be described in detail below.

[0042] Figure 2...

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Abstract

A microreactor for use in a microscope, comprising a first and second cove layer (13) , which cover layers are both at least partly transparent to an electron beam (14) of an electron microscope, and extend next to each other at a mutual distance from each other and between which a chamber (15) is enclosed, wherein an inlet (4) and an outlet (5) are provided for feeding fluid through the chamber and wherein heating means (8) are provided for heating the chamber and / or elements present therein.

Description

technical field [0001] The present invention relates to microreactors for electron microscopy. Background technique [0002] Electron microscopes are used to investigate specimens at high resolution, for example above 0.2 nm, especially above 0.12 nm. For this purpose, the specimen holder with the specimen therein is placed in the electron beam of an electron microscope, so that the image generated by this beam is displayed, for example on a phosphor screen, or is captured by means of a camera. These specimen studies are usually carried out in a vacuum environment at room temperature. [0003] US Patent No. 5406087 describes a specimen holder for electron microscopy, wherein the specimen holder is made of two layers of plastic film and coated with graphite for electrical conductivity. The films are supported on a metal wire grid for support and their edges are all insulated from each other by O-rings. The specimen can be sealed together with the water, after which the spe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/26
CPCH01J2237/206H01J2237/2002H01J37/20H01J37/26
Inventor 扬·弗雷德里克·克里默亨德里克·威廉·桑德贝尔根帕斯夸利纳·玛丽亚·萨罗
Owner TECH UNIV DELFT
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