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Method for making micro groove by laser processing mode and its device

A laser processing and micro-grooving technology, which is applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of reluctance, cost increase, and poor overall penetration efficiency of laser beams

Inactive Publication Date: 2007-10-31
MICRO BASE TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When the laser modulation device requires more lens groups with larger sizes, in addition to increasing the time required to adjust the lens groups and poor overall penetration efficiency of the laser beam, the cost of the overall laser processing equipment will also increase accordingly. few
However, if the problem is not solved by modulating the laser beam emitted by the laser generator, a larger laser generator must be used to emit a larger laser beam, and such an increase in cost is even more undesirable.

Method used

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  • Method for making micro groove by laser processing mode and its device
  • Method for making micro groove by laser processing mode and its device
  • Method for making micro groove by laser processing mode and its device

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Embodiment Construction

[0016] The specific embodiments adopted by the present invention will be further described by the following embodiments and accompanying drawings.

[0017] Please refer to FIG. 1 , which is a schematic diagram showing an apparatus for fabricating micro-grooves by laser processing in the present invention. As shown in the figure, the device 100 includes a laser generator 1, a laser modulation device 2, a mask 3, a projection lens group 4, and a displacement drive mechanism 5, wherein the displacement drive mechanism 5 is formed by a The X-axis displacement driving mechanism 51 is composed of a Y-axis displacement driving mechanism 52 and a Z-axis displacement driving mechanism 53 . The device 100 is used to process a workpiece 6 .

[0018] The laser generator 1 is used to emit a laser beam L; the laser modulation device 2 is used to modulate the irradiation cross-sectional size of the laser beam L and its distribution on the cross-section, and the laser beam L passes through t...

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Abstract

The laser machining for micro slot comprises the optical hood with at least a light translucent zone whose profile set based on the etching of minor slot, aligning the optical hood to a working piece pre-machining surface, a laser emitting machine with a laser adjusting the emission area of the laser beam, projecting the laser beam to the translucent, generating a etching laser beam projected to the preset working surface, etching the working piece using the etch laser, using a displacement drive mechanism driving the optical hood moving in the same direction with the preset displacement speed, forming a minor slot on the surface of the machining piece.

Description

technical field [0001] The invention relates to a technology for making micro-grooves, in particular to a method and device for making micro-grooves by laser beam dry etching. Background technique [0002] Looking at the current manufacturing technologies of micro-channels and micro-nozzles in liquid spray devices, they can be broadly classified into technologies such as exposure, development, etching, and laser etching. As far as the laser etching technology is concerned, the workpiece is directly etched with a laser beam to produce the structure to be produced, and then supplemented by the control of the mask, the fine micro-grooves can be etched, and the micro-flow of the liquid injection device can be produced. channels and micronozzles. [0003] When the overall size of the workpiece is large and the micro-grooves to be made are still fine, the laser modulation device can adjust the energy and irradiation area of ​​the laser beam to meet the overall size of the workpie...

Claims

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Application Information

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IPC IPC(8): B23K26/36B23K26/18B23K26/08B23K26/06B23K26/062B23K26/364
Inventor 谢淑品林茂盛叶源益林昌纬熊介铭
Owner MICRO BASE TECH CORP