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Glass substrate carrier for preventing static congregation

A glass substrate, electrostatic technology, applied in the direction of charge manipulation, packaging item types, lighting and heating equipment, etc., can solve problems such as damage to glass substrate semiconductor components and circuits, glass substrate scrap, and reduction of glass substrate yield.

Inactive Publication Date: 2008-01-09
E INK HLDG INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] When the carrier transports the glass substrate to the deburring machine and the glass substrate is separated from the pad, the static electricity generated on the pad can reach 15-16 kilovolts (Kilovolt, KV), and will damage the semiconductor components and circuits on the glass substrate , in severe cases, it may cause the entire glass substrate to be scrapped, thus greatly reducing the yield of the glass substrate
[0007] In view of the shortcoming that the existing carrier and the glass substrate are easy to generate high-voltage static electricity at the moment of detachment and damage the original semiconductor elements and circuits on the glass substrate, the inventors improved the shortcomings and defects, and then invented a glass substrate carrier that can effectively discharge and accumulate static electricity. Tool

Method used

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  • Glass substrate carrier for preventing static congregation
  • Glass substrate carrier for preventing static congregation
  • Glass substrate carrier for preventing static congregation

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Embodiment Construction

[0032] Please refer to Fig. 1~Fig. 3, the glass substrate carrier that prevents electrostatic accumulation of the present invention can move horizontally back and forth between a photoresist coating machine 80 and a burr removal machine 90, thus can place a The glass substrate on the glue coater 80 is transported to the deburring machine 90 .

[0033] The glass substrate carrier for preventing electrostatic accumulation includes: a base frame 10 and a plurality of pads 20 .

[0034] The pedestal 10 can move horizontally and be grounded. On the pedestal 10, two upright seats 15 are formed. The brackets are conductors, and at least one supporting portion 12 made of conductor protrudes from both sides of the end of each bracket 11 respectively, and a through hole 121 is formed on each supporting portion 12 respectively, and each supporting portion 12 The top surface is respectively formed with a fixing groove 123 communicating with the through hole 121. In addition, the through ...

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Abstract

The invention is a glass substrate carrier preventing static congregation, comprising a basal frame and multiple pads, where the basal frame is earthed, and formed with two erect seats, the two erect seats are conductors and two opposite ¿Ã-shaped brackets horizontally project from each erect seat, these brackets are conductors, at least a bearing part projects from each side of the end of each bracket, these bearing parts are conductors; these pads are arranged on these bearing parts separately, elastic and conductors; thus, the pads, bearing parts, brackets and erect seats compose a static discharge path, able to avoid over static congregation damaging glass substrate circuit on the carrier.

Description

technical field [0001] The invention belongs to a glass substrate carrier, in particular to a glass substrate carrier that prevents static electricity from gathering. Background technique [0002] Thin and frivolous LCD screens have become mainstream commodities nowadays, and are widely used in various occasions. [0003] The core component of the LCD screen is the glass substrate. In the manufacturing process of the LCD panel, thin film transistors and related circuits must be made on the glass substrate. The yellow light manufacturing process is to coat a uniform layer of photoresist on the glass substrate. , and then cooperate with a photomask to form a circuit pattern on the photoresist layer in subsequent steps, so that subsequent steps such as exposure and development can be performed. [0004] The current method of coating photoresist on a glass substrate is to place the glass substrate on a rotary photoresist coating machine, then drop an appropriate amount of photo...

Claims

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Application Information

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IPC IPC(8): G02F1/1333G03F7/20B65G49/06B65D85/48
Inventor 郑瑞忠薛东瀛
Owner E INK HLDG INC