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High accuracy non-contact tri-dimensional facial type measuring device

A measuring device, non-contact technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult to measure substances that cannot be directly contacted, unable to measure fine surface microscopic surface, unable to measure fine and complex surfaces, etc. Achieve low cost, reduce measurement error, and reduce Abbe error

Inactive Publication Date: 2008-01-16
中国人民解放军第二炮兵装备研究院第四研究所
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] One is that it cannot measure fine and complex surfaces
Because the measuring head is a mechanical device, it is impossible to measure the microscopic surface shape of the fine surface, and the surface shape information can only be obtained by fitting the characteristic surface after measuring a large distance. In this way, the data with a large error will be obtained. measurement results become meaningless;
[0008] Second, only hard surfaces can be measured
Because the soft surface will be deformed after being touched by the measuring probe, and incorrect surface information will be obtained;
[0009] Third, it is difficult to measure substances that cannot be directly contacted
It is mainly used to measure the geometric dimensions, positional relationship, etc. of larger structural parts, but it is not used to measure the three-dimensional surface shape of fine surfaces
[0014] In addition, the measurement method of the existing measuring device is to indirectly obtain the information of the measured object by measuring the movement of the sensor, so there will be a large Abbe error in the measurement process

Method used

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  • High accuracy non-contact tri-dimensional facial type measuring device
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  • High accuracy non-contact tri-dimensional facial type measuring device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Embodiment 1 A high-precision non-contact three-dimensional surface measurement device with a counterweight

[0044] It can be seen from Figure 1 that:

[0045] The gantry bracket 4 is fixed on the base 1 and is perpendicular to the base 1 ; the X-direction movement unit 2 is also installed on the base 1 ; the working table 3 is installed on the X-direction movement unit 2 . The X-direction motion unit 2 drives the object under test to make X-direction reciprocating motion during the dynamic measurement process;

[0046] The Y-direction movement unit 6 is fixed above the gantry support 4;

[0047] The Z-direction mounting frame 5 is installed on the Y-direction motion unit 6, the Z-direction motion unit 9 is installed on the Z-direction mounting frame 5, and the laser triangulation measurement sensor 8 is fixed on the Z-direction motion unit 9;

[0048] The counterweight 7 is made of steel and has a rectangular parallelepiped shape. It is installed on the Z-direction ...

Embodiment 2

[0056] Embodiment 2 An implementation of the Z-direction motion unit

[0057] Fig. 2 is a schematic diagram of the Z-direction motion unit. The sensor is installed on the motion platform 11, and the sensor is moved by the motion platform 11. The motion unit installation base 12 is used to be fixed on other components, and the motion platform 11 performs linear reciprocating motion on the support of the high-precision linear guide rail 13, which can ensure the straightness of the motion platform 11. The screw rod 14 can rotate under the drive of the drive motor 10 of the motion unit, and the screw rod 14 and the motion platform 11 constitute a worm gear component that can drive the motion platform 11 to move.

Embodiment 3

[0058] Embodiment 3 hard material---coin face shape measurement

[0059] 1. Measurement preparation

[0060] 1) Place the 1 yuan coin to be tested on the working platform of the measuring device described in Example 1, face up.

[0061] 2) Adjust the scanning head to the specified position, set the scanning format size, and set the corresponding parameters (X=20000 microns, format Y=20000 microns, spacing=20 microns) in the control computer control software.

[0062] 3) Start the rapid positioning function, that is, the system performs a zigzag rapid sampling movement within the measured range, and analyzes the places where the system may cross the boundary.

[0063] 4) Adjust the relative position between the measurement sensor and the measured object, and obtain the relative height data value of the "zigzag" scanning area, which is 0.011mm-0.013mm. If it exceeds the measurement range of the sensor, " -------" data, that is, invisible data, by analyzing the distribution of ...

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Abstract

The invention relates to a high-precision non-contact 3D surface measurement device. The device comprises a laser measurement sensor, an X-direction moving unit, a Y-direction moving unit, and a Z-direction moving unit. The invention provides a high-precision non-contact measurement device and the measurement method. The invention can be used for high-precision and rapid measurement on the surface of hard material, soft material and mirror surface material without damage, so as to obtain surface type, size, surface state and other data.

Description

Technical field: [0001] The invention relates to a high-precision non-contact three-dimensional surface measurement device. It specifically relates to a system for non-contact, fast and high-precision dynamic measurement of the fine structure of the object surface. The invention also relates to a high-precision non-contact microscopic measurement method for a three-dimensional surface shape. Background technique: [0002] In production and scientific research practice, it is often necessary to measure the surface profile of many objects, that is, to measure the microstructure of the surface. In many cases, it is rare and important to know the three-dimensional structure of the surface, especially the fine three-dimensional structure. There are following methods for measuring surface profile in the prior art: [0003] 1. Image technology measurement [0004] The most common surface measurement method is to take pictures of the surface of the object, and obtain the image o...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/03G01B11/24
Inventor 黄亮慈林林杨斌杨银刚葛根焰姜春福
Owner 中国人民解放军第二炮兵装备研究院第四研究所
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