Light source device

Abstract

The invention provides a lamp equipment, for preventing reading means for reading lamp data from heating or voltage injuring, on reading lamp data and managing the use state of lamp and using records. The lamp data is displayed on lamp head of lamp in advance. A reading unit of lamp data is mounted on the lamp head seat for keeping lamp head. When the lamp is kept on the lamp head seat and the lamp is not lighted, the reading unit is moved to the position of reading lamp data. Before lighting, the reading unit is moved to retreating position and a screening part for screening heat generated by lamp is mounted at the retreating position. The lamp data is lamp property such as production month and day, manufacturer name, manufacturing location, manufacturing line, lamp type, breed number, batch number, identification number and preset specification such as rated current, rated voltage, cooling condition, mounting direction on the device, operation limit time. The display format of the lamp data is optical readable bar code, two-dimensional code, character, earmark, symbol, figure, pattern and so on.

Description

technical field [0001] The present invention relates to a light source device, and more particularly, to a light source device that protects a lamp data reading unit for reading lamp data displayed on a lamp. Background technique [0002] Conventionally, the pattern of the mask for manufacturing LSI etc. is exposed to a board|substrate by the exposure apparatus which uses a discharge lamp as a light source. Before exposure, it is necessary to accurately set the positional relationship between the mask and the substrate. Therefore, in the method disclosed in Patent Document 1, the alignment mark on the mask and the substrate is imaged by an imaging device. Align the relative positions of the mask and substrate so that the two marks coincide. After the alignment is completed, the imaging device is retracted. [0003] In addition, unless the discharge lamp satisfies predetermined specifications such as wavelength and light quantity, the substrate cannot be exposed with high ...

AI Technical Summary

Problems solved by technology

A pulse-shaped high voltage that causes insulation breakdown between the lamp electrodes is applied from the lamp base to light the discharge lamp, so the high voltage may cause insulation breakdown of the components of the reading device.

In addition, in electrodeless discharge lamps lit by microwaves and discharge lamps lit by high-frequency current, the components of the reading device are remarkably degraded by electromagnetic waves, or normal reading operations cannot be performed.

Moreover, when the discharge lamp is lit, the surroundings of the base are in a high temperature state of about 200°C to 300°C, so the components of the reading device are degraded by heat.

If the reading device deteriorates, the use status and use history of the lamp cannot be accurately managed.

In order to avoid this situation, if a cooling structure or an insulating structure is provided to protect the reading device from heat or high voltage, the structure of the light source device becomes complicated and the cost increases

In addition, since the conditions of the cause of deterioration are significantly different, it is difficult to directly apply the method of plugging and unplugging the discharge lamp in the light path of the imaging device disclosed in Patent Document 1 to the management of the discharge lamp of the light source device.

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