Supply power adjusting apparatus and semiconductor manufacturing apparatus

A technology for power regulators and manufacturing devices, applied in semiconductor/solid-state device manufacturing, output power conversion devices, electric heating devices, etc., can solve problems such as power supply changes and load change stability deterioration, and achieve excellent temperature responsiveness and use Good convenience and good stability
CN101128972AActive Publication Date: 2008-02-20KOKUSAI ELECTRIC SEMICON SERVICE +1
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
KOKUSAI ELECTRIC SEMICON SERVICE
Publication Date
2008-02-20

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Abstract

A semiconductor manufacturing apparatus for performing heat treatment by carrying a substrate holder, on which a plurality of substrates are loaded, into a reacting furnace. The semiconductor manufacturing apparatus is provided with a heater arranged on a circumference of the reacting furnace, and a supply power adjusting apparatus for adjusting a supplying power to the heater. The supply power adjusting apparatus is composed of a power IGBT converter for converting an alternating voltage from an alternating power supply into an alternating power in accordance with the frequency of a control signal and supplying the heater with the alternating power, and a regenerating IGBT converter for regenerating a back electromotive force generated by switching operation of the IGBT converter and returning the back electromotive force to the alternating power supply.
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Description

technical field

[0001] The present invention relates to a power supply regulator for supplying power to a heater and a semiconductor manufacturing device using the power supply regulator. Background technique

[0002] Fig. 3 shows a conventional power supply conditioner for a heater. The heater power supply conditioner 20 has a power receiving terminal board 2 connected to the AC power supply 1 at its input end and a distribution terminal board 6 connected to the heater 7 at its output end. A power circuit breaker 3 , a power transformer 4 , and a power control thyristor 5 serving as a power conditioner are connected between the power receiving terminal board 2 and the distribution terminal board 6 . A thermocouple 8 for temperature measurement is provided in the heater 7 .

[0003] An AC power source 1 is input from a power receiving terminal board 2 , and power is supplied to a power transformer 4 through a power circuit breaker 3 . The power transformed by the power tr...

Claims

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