Multilayer piezoelectric element

A piezoelectric, laminated technology, applied in the manufacture/assembly of electrical components, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive devices, etc. question

Inactive Publication Date: 2008-02-27
IBIDEN CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, it was found that the conventional piezoelectric body has the following tendency. When the Curie temperature Tc is increased, the piezoelectric constant d will be reversed. 33 decrease, on the contrary, if the piezoelectric constant d is increased 33 , on the contrary the Curie temperature Tc decreases

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-1～4 and comparative example 1-1、2

[0067] Use PbO for the Pb component and ZrO for the Zr component 2 , Ti component using TiO 2 , use SrO for the Sr component, and Nb for the Nb component 2 o 5 , The Zn component uses ZnO, weighs these components so as to satisfy the composition a~d after firing shown in Table 1 of Examples 1-1~4 and Comparative Examples 1-1, 2, add the mixture of each component and pure water Mix and pulverize in a ball mill for 20 hours, then dry. At this time, 65% of the total weight of pure water was applied. Also, the rotational speed of the ball mill was 500 rpm. Then, the mixture pulverized in a ball mill was dried at 100° C. for 24 hours to dehydrate, then calcined in air at 850° C. for 2 hours, and the calcined powder was pulverized by a ball mill for 20 hours. The average particle diameter after pulverization was 0.8 μm. To the obtained powder, polyvinyl alcohol was added as a binder in an amount of 0.5% by weight, and granulated so that the particle diameter was about 1.4 μm. ...

Embodiment 2-1～4 and comparative example 2-1、2

[0086] Weigh out PbO, ZrO 2 、TiO 2 , SrO, Nb 2 o 5 A multilayer piezoelectric element was produced in the same manner as in Example 1 above except that the compositions a to d shown in Examples 2-1 to 4 and Comparative Examples 2-1 and 2 in Table 2 satisfied ZnO. Then, for each of these multi-layer piezoelectric elements, (1) the piezoelectric constant d by the resonance method was obtained 33 , (2) The piezoelectric constant d based on the actual displacement 33 , (3) Actual displacement ΔL2, (4) Curie temperature Tc, (5) Displacement change rate in the reliability test, the results are concentrated in Table 2.

[0087] Table 2

[0088]

[0089] In Examples 2-1 to 4 and Comparative Examples 2-1 and 2, the values ​​of a, c, and d were fixed and the value of b was varied. The results, as shown in Table 2, at 1.1×10 -2 ≤b≤6.0×10 -2 In the range of the piezoelectric constant d 33 , the actual displacement ΔL2, the Curie temperature Tc, and the rate of change ...

Embodiment 3-1～6 and comparative example 3-1、2

[0091] Weigh out PbO, ZrO 2 、TiO 2 , SrO, Nb 2 o 5 A multilayer piezoelectric element was produced in the same manner as in Example 1 above except that the compositions a to d shown in Examples 3-1 to 6 and Comparative Examples 3-1 and 2 in Table 3 satisfied ZnO. Then, for each of these multi-layer piezoelectric elements, (1) the piezoelectric constant d by the resonance method was obtained 33 , (2) The piezoelectric constant d based on the actual displacement 33 (3) Actual displacement ΔL2, (4) Curie temperature Tc, (5) Displacement change rate in the reliability test. The results are summarized in Table 3.

[0092] table 3

[0093]

[0094] In Examples 3-1 to 6 and Comparative Example 3-1, the values ​​of a and d were fixed and the values ​​of b and c were varied. The results, as shown in Table 3, at 0.9×10 -2 ≤c≤4.25×10 -2 In the range of the piezoelectric constant d 33 , the actual displacement ΔL2, the Curie temperature Tc, and the rate of change of t...

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Abstract

A multilayer piezoelectric element 20 includes a plurality of piezoelectric layers 11 and a plurality of inner electrode layers 12 alternately stacked, a first outer electrode 18 that electrically couples together every other inner electrode layers 12 in the lamination direction, and a second outer electrode 19 that electrically couples together the remaining inner electrode layers 12. The piezoelectric layers 11 are obtained by molding and firing a mixture containing a Pb component, a Zr component, a Ti component, a Sr component, a Nb component, and a Zn component. When the piezoelectric layers 11 are each represented by general formula Pb(Zr a Ti 1-a )O 3 + bSrO + cNbO 2.5 + dZnO, the relative amounts of the individual components, for example, satisfy the relationships a = 0.51, b = 2.0 × 10 -2 , c = 1.50 × 10 -2 , d = 0.5×10 -2 , and c / d = 3.0.

Description

technical field [0001] The present invention relates to a multi-layer piezoelectric element. Background technique [0002] The piezoelectric body is electrically polarized when a stress is applied, and deformed when an electric field is applied. The generation of electric polarization caused by stress and the generation of deformation caused by electric field are physical phenomena based on the same reason, and this phenomenon is called piezoelectric effect. In addition, the multilayer piezoelectric element utilizes the piezoelectric effect of the piezoelectric body, and has been put into practical use in products such as quartz vibrators, electrometers, sensors, motors, automobile parts, and many other fields. As this multilayer piezoelectric element, as disclosed in Patent Documents 1 and 2, for example, a technique is known in which a plurality of piezoelectric layers and internal electrode layers are alternately stacked, and the internal electrode layers are aligned in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/083C04B35/49H01L41/187H01L41/22H01L41/24H02N2/00C04B35/491H01L41/257H01L41/27H01L41/39
CPCC04B2235/5445C04B35/6261C04B2235/6587C04B2235/3284C04B35/6263B32B2311/08C04B35/491C04B2235/3251C04B2235/3213C04B35/62625H01L41/083C04B2237/408H01L41/187C04B2237/348C04B2237/346C04B2235/5436H01L41/1876H10N30/50H10N30/8554
Inventor 伊藤淳松野吉弥井户贵彦鹿野治英福安繁夫松山卓央
Owner IBIDEN CO LTD
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