Diffractive optical component making method
A technology of diffractive optical elements and manufacturing methods, applied in optical elements, diffraction gratings, optics, etc., can solve problems such as the decline of diffraction efficiency, and achieve the effect of achieving diffraction efficiency
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[0043] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in this specification and drawings, the same code|symbol is attached|subjected about the component which has substantially the same functional structure, and repeated description is abbreviate|omitted.
[0044] In the method of manufacturing a diffractive optical element according to an embodiment of the present invention, a diffractive optical element having a periodic stepped shape is manufactured by repeatedly performing a series of processes using semiconductor microfabrication technology. A series of processing refers to coating a resist on a substrate, exposing and developing the substrate using a mask formed with a predetermined pattern, and forming a resist consisting of a resist removed part and a resist remaining part. A resist pattern is used for etching.
[0045] In addition, there are various kinds of diffractive optical elem...
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