3d shape testing device

Abstract

The invention provides a three-D shape measurement device. XYZ reference mirrors (2, 3, 4) of XYZ coordinates and a Z pneumatic sliding rail part (11) are formed through the sharing on the upper and lower sides, so that the upper and the lower measurement coordinate systems are made completely identical. In addition, a dislocation detecting unit for a contact pin (5) is made thinner by a diffraction grating (8), and the bearing part of a probe is made further thinner through the use of a pulley (18) and a dead load spring (17). Hereby, the structure is made simple, the miniaturization is achieved, and the manufacturing is easy.

Description

technical field [0001] The present invention mainly relates to a device for measuring the shape and the like of an object to be measured such as an aspherical lens with ultra-high precision at the nanometer level. Background technique [0002] According to the design value required by the optical design, the aspheric lens must be made into a high-precision lens with an error range of less than 0.1 microns, but only in the processing of aspheric lenses, there is no processing machine that can achieve this precision. Therefore, the inventors have invented an ultra-high-precision three-dimensional measuring machine on the order of 0.01 micron in the past. This measuring machine is widely used as a necessity for developing and manufacturing aspheric lenses. The contents are described in Patent Documents 1 to 4 and the like. Using this measuring machine, by feeding back the measurement results to the processing of aspheric lenses, it is possible to produce aspheric lens molds o...

AI Technical Summary

Problems solved by technology

[0025] In the structures of the above-mentioned existing patent documents 1 to 4, since the front and back cannot be measured without turning the back of the measured object over, there is a problem that in order to make the measurement coordinate system of the front and back the same, if you do not use, for example, the patent document Inclination and eccentricity cannot be measured with jigs as described in 7.

However, in ball screw conveyance, although a large force is output, there are problems such as poor responsiveness, deterioration of straightness due to clearance of the screw or force in the lateral direction when the screw rotates, etc.

[0051] In addition, with the structure of the constant-load spring support in Patent Document 2, because the characteristics of the two springs formed by the wound thin plates are inconsistent, sometimes a force other than the Z direction is generated, and this force deteriorates the straightness of movement in the Z-axis.

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