3d shape testing device

A technology for measuring device and three-dimensional shape, applied in the field of devices, can solve problems such as inability to measure inclination and eccentricity, deterioration of Z-axis movement straightness, inability to measure the surface and back, and achieve the effects of light probe, reduced measurement error, and simple structure

Active Publication Date: 2008-05-07
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0025] In the structures of the above-mentioned existing patent documents 1 to 4, since the front and back cannot be measured without turning the back of the measured object over, there is a problem that in order to make the measurement coordinate system of the front and back the same, if you do not use, for example, the patent document Inclination and eccentricity cannot be measured with jigs as described in 7.
However, in ball screw conveyance, although a large force is output, there are problems such as poor responsiveness, deterioration of straightness due to clearance of the screw or force in the lateral direction when the screw rotates, etc.
[0051] In addition, with the structure of the constant-load spring support in Patent Document 2, because the characteristics of the two springs formed by the wound thin plates are inconsistent, sometimes a force other than the Z direction is generated, and this force deteriorates the straightness of movement in the Z-axis.

Method used

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Experimental program
Comparison scheme
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no. 1 approach

[0141] Fig. 1 is a front view showing the structure of a three-dimensional shape measuring device in the first embodiment of the present invention, Fig. 2 is a right sectional side view viewed from the right side after being cut from the center of Fig. 1 , and Fig. 3A and Fig. 3B are Stereoscopic view and its partial enlargement.

[0142] The three-dimensional shape measuring device is configured to include: a lower stone platform 23; a side stone platform 24, which is erected and fixed on the back side of the upper surface of the lower stone platform 23; a first unit A, which has measurement object holding members 98, Z Reference mirror (Z direction reference mirror, hereinafter referred to as "Z reference mirror") 2, X reference mirror (X direction reference mirror, hereinafter referred to as "X reference mirror") 3 and Y reference mirror (Y direction reference mirror, hereinafter referred to as "Y Reference mirror ") 4; second unit B, which has at least Zf mirror part 9f, Z...

no. 2 approach

[0198] In the first embodiment, the structure itself of the large air bearing 11 has been particularly described in detail, however, in the three-dimensional shape measuring device according to the second embodiment of the present invention, the two measuring probes 10f are moved in the Z direction The guide portion along the Z direction of the measuring probe moving device 93 in 10b, that is, the guide rail portion 11g of the large air bearing 11 is constituted by the same processing plane up and down. Specifically, as shown in FIG. 1 , the guide rail portion 11g of the large air bearing 11 is cut off at the left side of the central portion (refer to 11p) in order to prevent mutual interference with the measuring object 1, and the right side of the guide rail portion 11g and the paper The planes parallel to each other are connected up and down to form one. In addition, since the guide rail portion 11g of the large air bearing 11 is a square prism, it has four faces, and these...

no. 3 approach

[0201] In the first and second embodiments, it was described that the directions of the coordinate axes of the front and back of the measurement object 1 can be completely aligned. However, it is actually extremely difficult to align the stylus 5f and 5b on the same Z-axis with an accuracy of less than 0.1 micron.

[0202] Therefore, in the three-dimensional shape measuring device according to the third embodiment of the present invention, as shown in FIGS. 4A and 3D , the reference ball 91 having a good sphericity is supported on the part of the measuring object holding plate portion 98d of the measuring object holding member 98. The through hole 98e measures the supported reference ball 91 from the surface (upper surface or front surface) and back surface (lower surface or rear surface) of the supported reference ball 91 by the stylus 5 and 5b. As the reference ball 91, those with a degree of sphericity of 30 nm can be relatively easily manufactured. In addition, in the thr...

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Abstract

The invention provides a three-D shape measurement device. XYZ reference mirrors (2, 3, 4) of XYZ coordinates and a Z pneumatic sliding rail part (11) are formed through the sharing on the upper and lower sides, so that the upper and the lower measurement coordinate systems are made completely identical. In addition, a dislocation detecting unit for a contact pin (5) is made thinner by a diffraction grating (8), and the bearing part of a probe is made further thinner through the use of a pulley (18) and a dead load spring (17). Hereby, the structure is made simple, the miniaturization is achieved, and the manufacturing is easy.

Description

technical field [0001] The present invention mainly relates to a device for measuring the shape and the like of an object to be measured such as an aspherical lens with ultra-high precision at the nanometer level. Background technique [0002] According to the design value required by the optical design, the aspheric lens must be made into a high-precision lens with an error range of less than 0.1 microns, but only in the processing of aspheric lenses, there is no processing machine that can achieve this precision. Therefore, the inventors have invented an ultra-high-precision three-dimensional measuring machine on the order of 0.01 micron in the past. This measuring machine is widely used as a necessity for developing and manufacturing aspheric lenses. The contents are described in Patent Documents 1 to 4 and the like. Using this measuring machine, by feeding back the measurement results to the processing of aspheric lenses, it is possible to produce aspheric lens molds o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B5/012G01B5/20G01B11/24G01B21/20
Inventor 吉住惠一久保圭司望月博之舟桥隆宪
Owner PANASONIC CORP
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