Liquid-phase epitaxy graphite boat preventing boat-sticking of mother liquid

Abstract

The invention discloses a liquid phase epitaxial graphite boat preventing mother liquor viscosing boat, which comprises a base, a floor, a slipping block and a recycling boat; wherein, a groove is arranged in the middle of the base; the floor is embedded in the groove of the base, and the middle of which is provided with two cavity holes for the recycling boat and the substrate; the slipping block is arranged on the floor and can slip freely along horizontal direction, and the middle of which is provided with a plurality of mother liquor grooves with equal interval for different film growing mother liquor. A graphite recycling boat for collecting wasting mother liquor is arranged in the cavity of the recycling boat. A graphite washer for adjusting the height of the substrate is arranged on the lower part of the substrate cavity. The substrate is arranged on the top of the graphite washer. The mother liquor groove is covered with a graphite cover. The liquid phase epitaxial graphite boat preventing mother liquor viscosing boat has the advantages of avoiding mother liquor viscosing the graphite boat in cooling process since the mother liquor can be separated from the graphite boat after the epitaxial film growing, solving the problems of the film growing system that other graphite boats can grow and the mother liquor viscose the boat.

Description

technical field [0001] The invention relates to a graphite boat for liquid phase epitaxy equipment for growing semiconductor single crystal thin films, in particular to a graphite boat that can separate mother liquor in a high-temperature molten state to prevent mother liquor from sticking to the boat. It is suitable for the liquid phase where the mother liquor will stick to the graphite boat after cooling. Growth system for epitaxial thin films. Background technique [0002] At present, the graphite boats used in the liquid phase epitaxial film growth process can be divided into stacked types according to the structure (see a kind of graphite boat with a mother liquor removal device for the growth of mercury cadmium telluride liquid phase epitaxial film materials [P], Chinese patent : CN1360090A, 2002) and tunneling (see Method of depositing expitaxial semiconductor layers from the liquid phase [P], United States Patent, US3753801.1973) two categories, they have different a...

AI Technical Summary

Problems solved by technology

However, for the case where the mother liquor firmly adheres to the graphite boat after the growth is completed and cooled to room temperature, the current graphite boat cannot be used.

For example, when using elemental Te and Cd as raw materials, when growing a CdTe film at 650°C by the Te-rich method, although the liquid mother liquor is easy to separate from the graphite boat in the molten state, after the growth is completed and cooled to room temperature, the remaining waste mother liquor is not only Firmly stick to the mother liquid tank, and tightly stick the sliding boat and the bottom plate together, so that the graphite boat cannot be grown next time, and it has to be soaked in aqua regia until it has completely reacted before it can be taken out, which increases the difficulty of growth and Extended growth cycle

Images