Diffractive optical element, optical system and optical apparatus
A technology of diffractive optical elements and optical systems, applied in the field of diffractive optical elements, can solve the problems of not being high enough, the degradation of diffraction efficiency, etc., and achieve high diffraction efficiency and the effect of suppressing unnecessary diffracted light
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Embodiment 1
[0093] FIG. 1 is a front view (left diagram) and a side view (right diagram) of a diffractive optical element as an example (Example 1) of the present invention. In FIG. 1, the character O represents the central axis of the diffractive optical element. figure 2 It is a partially enlarged view showing the diffractive optical element of FIG. 1 in a cross section taken along the line A-A' of FIG. 1 . It should be noted here that figure 2 Not drawn to scale along raster depth.
[0094] As shown in these drawings, the diffractive optical element 10 includes a first element portion 12 and a second element portion 13 . The first element part 12 includes a first transparent substrate 14 and a first grating forming layer composed of a grating base 16 provided on the first transparent substrate 14 and a first diffraction grating 18 integrally formed with the grating base 16 . The second element part 13 includes a second transparent substrate 15 and a second grating forming layer co...
Embodiment 2
[0136] Embodiment 2 of the present invention will be described below. The diffractive optical element of this embodiment has basically the same configuration as that of Embodiment 1. That is, elements with Figure 1 and figure 2 structure shown. Therefore, the same reference numerals are assigned to components common to Embodiment 1, their detailed explanation will be omitted, and the following description will focus on the differences.
[0137] In the diffractive optical element 10 of this embodiment, figure 2 The first diffraction grating 18 shown is made of acrylic resin and ZrO 2 Particles are made of mixed material (nd=1.611, vd=45.5). The second diffraction grating 19 is made of a mixed material (nd=1.567, vd=21.7) of acrylic resin and ITO particles. The same grating thickness d of the first and second diffraction gratings 18 and 19 is 13.3 µm.
[0138] Figure 5A The diffraction efficiency of the first-order diffracted light in the diffractive optical element 10...
Embodiment 3
[0141] Embodiment 3 of the present invention will be described below. The diffractive optical element of this embodiment has basically the same configuration as that of Embodiment 1. That is, elements with Figure 1 and figure 2 structure shown. Therefore, the same reference numerals are assigned to components common to Embodiment 1, their detailed explanation will be omitted, and the following description will focus on the differences.
[0142] In the diffractive optical element 10 of this embodiment, figure 2 The first diffraction grating 18 shown is made of acrylic resin and Al 2 o 3 Particles are made of mixed material (nd=1.594, vd=58.0). The second diffraction grating 19 is made of a mixed material (nd=1.519, vd=16.5) of fluororesin and ITO particles. The same grating thickness d of the first and second diffraction gratings 18 and 19 is 7.8 µm.
[0143] Figure 6A The diffraction efficiency of the first-order diffracted light in the diffractive optical element 1...
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Abstract
Description
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