Hartmann sensor for enlarging dynamic range through separating wave face integral inclination

Abstract

The invention provides a Hartmann sensor of enlarging the dynamic range through separating the global tilt of a wave surface, which can measure wave surface information with large tilt. The invention is characterized in that: compared with a common Hartmann sensor, the Hartmann sensor is provided with an optical splitting system on the back of a beam contracting system and in front of a microlens, which educes partial signal light out of a main optical path; the partial light is focused onto a photodetector which is placed on the focus of the lens through a focusing lens, so that global tilt information of an incident wave surface can be acquired through analyzing the deviation situation of a focal spot, and information of the whole wave surface can be acquired through superposing the partial information and the wave surface information acquired on the Hartmann sensor. The invention realizes the function of measuring large tilt wave surface information without affecting the measurement precision of the Hartmann sensor by arranging a matched optical splitting path based on the common Hartmann sensor. The Hartmann sensor of enlarging the dynamic range through separating the global tilt of a wave surface has the advantages of simple structure and low increased cost when compared with the common Hartmann sensor.

Description

technical field [0001] The invention relates to a Hartmann sensor system, in particular to a Hartmann sensor with a large dynamic range. Background technique [0002] A Hartmann wavefront sensor is an instrument capable of detecting the shape of a wavefront, and it has been widely used in adaptive optics, optical mirror detection, medical instruments, and celestial object imaging. A traditional Hartmann sensor is usually composed of a beam reduction system, a microlens array, a photodetector, and a wavefront processor. Dynamic range is a very important characteristic parameter in the design and use of Hartmann sensors. The dynamic range of Hartmann sensors can be interpreted as the ability to prevent the focal point after being focused by the microlens array from crossing its corresponding sub-aperture. The measured maximum local wavefront slope. In general, it can be achieved by reducing the number of Hartmann's sub-apertures, using a microlens array with a short focal le...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: to overcome the disadvantages of the prior art that the measurement accuracy and the dynamic range cannot be taken into account at the same time, based on the traditional Hartmann, to provide a Hartmann with high precision and a large dynamic range for tilting Sensor; it can measure distorted wavefront information with considerable inclination without affecting the measurement accuracy Provide convenient and cheap Hartmann sensor for fields that need to measure large inclination wavefront information

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