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Separable detecting viewfinder and detecting system

A separation type, window technology, applied in the field of detection devices of the plasma process, can solve the problems of uneven bottom surface of the detection window, difficult to clean, and high replacement cost, so as to solve the problem of unclean cleaning, reduce process costs, and solve cleaning problems. difficult effect

Inactive Publication Date: 2008-10-15
UNITED MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention provides a detachable detection window, which can solve the known problems of uneven bottom surface of the detection window, difficult cleaning and high replacement cost

Method used

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  • Separable detecting viewfinder and detecting system
  • Separable detecting viewfinder and detecting system
  • Separable detecting viewfinder and detecting system

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0040] figure 2 It is an exploded perspective view of the detachable detection window according to the first embodiment of the present invention.

[0041] Please refer to figure 2 , the detachable detection window of this embodiment mainly includes a base 210 and a hollow pipe 220 . Wherein, the base 210 has a first combining portion 212 , and the first combining portion 212 is, for example, a concave portion. The base 210 is made of a transparent material, such as glass, quartz, acrylic or other suitable transparent materials. In addition, one end of the hollow tube 220 has a second joint portion 222 , such as a protrusion corresponding to the first joint portion 212 . The material of the hollow tube 220 may be the same as or different from that of the base 210 . The material of the hollow tube 220 is a transparent material, such as glass, quartz, acrylic or other suitable transparent materials.

[0042] The present invention does not specifically limit the shapes of t...

no. 2 example

[0049] Figure 6 It is an exploded perspective view of the detachable detection window according to the second embodiment of the present invention.

[0050] Please refer to Figure 6 , the detachable detection window of this embodiment is similar to the detachable detection window of the first embodiment, the main difference is only: the base 610 and the hollow pipe 620 of the detachable detection window of this embodiment are provided with threads The groove is formed by using a locking method.

[0051] The base 610 of the detachable detection window of this embodiment has a first joint portion 612 . The first coupling portion 612 is, for example, a concave portion, and a thread groove is provided on an inner peripheral surface of the concave portion. The base 610 is made of a transparent material, such as glass, quartz, acrylic or other suitable transparent materials. One end of the hollow pipe 620 has a second joint portion 622 , and the second joint portion 622 is prov...

no. 3 example

[0055] Figure 8 It is an exploded perspective view of the detachable detection window according to the third embodiment of the present invention.

[0056] Please refer to Figure 8 , the detachable detection window of this embodiment mainly includes a base 810 and a hollow pipe 820 . Wherein, the base 810 has a first combining portion 812 , for example, the first combining portion 812 is a concave portion formed by bending a part of the base 810 inward. The base 810 is made of a transparent material, such as glass, quartz, acrylic or other suitable transparent materials. In addition, one end of the hollow tube 820 has a second joint portion 822 , and the second joint portion 822 is inserted into the first joint portion and rotated by an angle, so that the first joint portion 812 and the second joint portion 822 will engage. The material of the hollow tube 820 can be the same as or different from that of the base 810 . The material of the hollow tube 820 is a transparent m...

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Abstract

The invention relates to a separable detecting window which is suitable for being arranged on the side wall of a plasma reaction chamber, comprising a base and a hollow tube part; wherein, the base is provided with a first combining part, and one end of the hollow tube part is provided with a second combining part; the base and the hollow tube part are combined into the separable detecting window by the connection of the first combining part and the second combining part.

Description

technical field [0001] The invention relates to a detection device for a plasma process, and in particular to a detachable detection window and a detection system. Background technique [0002] At present, in the manufacture of integrated circuits, plasma (plasma) has been widely used in thin film deposition, etching or photoresist removal processes. For example, using plasma to deposit a thin film can reduce the thermal budget of the process to save process cost. In addition, using plasma to etch the thin film can provide anisotropic etching. [0003] Generally, one of the problems that occurs when wafers are fabricated using a semiconductor device equipped with a plasma chamber is that it is difficult to recognize whether the plasma has been activated, or to determine the state of wafer fabrication inside the plasma chamber. Therefore, a detection system is configured on the plasma reaction chamber, and the internal conditions of the plasma reaction chamber can be known ...

Claims

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Application Information

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IPC IPC(8): H01L21/00H01L21/66
Inventor 林南莹
Owner UNITED MICROELECTRONICS CORP
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