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On-line automatic testing method and system for beam vibration fatigue reliability of micro electro-mechanical systems

An automatic testing system, micro-electromechanical system technology, applied in vibration testing, testing of machine/structural components, using repeated force/pulsation force to test the strength of materials, etc., to achieve simple system, low cost, automatic loading and measurement steps Effect

Inactive Publication Date: 2008-12-10
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So far, there is no report of this kind of fatigue test system that can test MEMS beams under vibration loads on-line

Method used

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  • On-line automatic testing method and system for beam vibration fatigue reliability of micro electro-mechanical systems
  • On-line automatic testing method and system for beam vibration fatigue reliability of micro electro-mechanical systems
  • On-line automatic testing method and system for beam vibration fatigue reliability of micro electro-mechanical systems

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] An online automatic test system for vibration fatigue reliability of MEMS beams. The material of MEMS beams is polysilicon. The geometric dimensions of MEMS beams are: 300 μm in length, 30 μm in width, and 2 μm in thickness, and the distance between the beam unit and the substrate 2μm, first use AC voltage to load the vibration fatigue load on the MEMS beam to make it vibrate for a specific number of times, the AC voltage amplitude is 7V, the frequency is 20KHz, the AC voltage plus

[0033] The loading time was 100 minutes, then, remove the above-mentioned vibration fatigue load (that is, stop adding the AC signal, and then load the DC measurement voltage on the MEMS beam, and the DC measurement voltage starts to add from 40V until the beam pulls in, and the measured Reflect the pull-in voltage value of the MEMS beam fatigue characteristics, repeat the above steps to alternate loading and measurement until the AC voltage loading time of the MEMS beam reaches 1500 minutes...

Embodiment 2

[0036] An online automatic test system for MEMS beam vibration fatigue reliability, consisting of a voltage generation module 10, an amplifier 20, a MEMS beam 30, a timer 40, a voltage detection module 50, a protection circuit 60 and a data output module 70, the voltage The generation module 10 generates AC voltage or DC voltage, and controls the conversion of AC and DC voltages through the program. The generated voltage is amplified by the amplifier 20 and then loaded onto the MEMS beam 30 to complete the measurement process of loading and pull-in voltage alternately. The voltage causes the MEMS beam 30 to vibrate and cause fatigue. The DC voltage is used as the pull-in voltage of the MEMS beam 30 to measure the voltage. The voltage detection module 50 detects the voltage drop of the protection circuit 60 by detecting the voltage change at both ends of the protection circuit 60. At the same time, record the pull-in voltage value and output the pull-in voltage value data of the...

Embodiment 3

[0043] An online micro-electro-mechanical system beam vibration fatigue characteristics automatic test system is composed of a voltage generation module 10, an amplifier 20, a micro-electro-mechanical system beam 30, a timer 40, a voltage detection module 50, a protection circuit 60 and a data output module 70. The module 10 generates AC voltage or DC voltage, and the timer 40 or the voltage detection module 50 sends a signal to the voltage generating module 10 to control the conversion of the AC and DC voltages through the program, and the generated voltage is amplified by the amplifier 20 and loaded into the MEMS On the beam 30, the measurement process of the loading or pull-in voltage is completed. The AC voltage makes the MEMS beam 30 vibrate and fatigue, and the DC voltage is used as the measurement voltage of the pull-in voltage of the MEMS beam 30. The voltage detection module 50 detects the protection circuit 60 When the voltage changes at both ends, the protection circ...

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Abstract

The invention discloses an automatic testing system for the vibration fatigue characteristic of a on-line micro electromechanical system beam which consists of a voltage generating module, an amplifier, a beam, a timer, a voltage detecting module, a protection circuit and a data output module. The invention adopts the technical scheme as follows: firstly using an AC voltage to load a vibration fatigue load on the micro electromechanical system beam to lead the beam to vibrate for specific times; removing the vibration fatigue load, then loading a DC measuring voltage on the beam to detect a pull-in voltage value which reflects the fatigue characteristic of the beam, finally repeating the steps to lead the loading and the measuring to be alternatively carried out to obtain a relation between the pull-in voltage value which reflects the fatigue characteristic of the beam and the vibration times of the beam. The automatic testing system integrates the loading of the vibration fatigue load and the testing of the fatigue characteristic, thereby leading the system to be simpler; besides, the measuring process is completely automatic and no persons are needed to watch the whole process.

Description

technical field [0001] The invention relates to an online automatic measurement method and system for MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system) device performance, in particular to an online automatic test method and system for fatigue reliability of a micro-electro-mechanical system beam vibration load. Background technique [0002] The full English name of MEMS is Microelectromechanical System, which means microelectronics-mechanical system, or microelectromechanical system for short. [0003] MEMS beams are mechanical devices, and they will vibrate continuously in various applications. As the number of vibrations increases, MEMS beams will experience fatigue failure. The fatigue test of MEMS beams under the action of vibration load, due to the high number of cycles of fatigue failure, generally not less than 10 9 Firstly, it takes a long time to test the fatigue performance of MEMS beams, so the design of an online automatic testing MEMS bea...

Claims

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Application Information

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IPC IPC(8): G01M7/02G01N3/38G01R19/00
Inventor 唐洁影陈龙龙尚金堂
Owner SOUTHEAST UNIV
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