Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform

A technology with motor execution and degrees of freedom, applied in microlithography exposure equipment, photolithographic process exposure devices, etc., can solve problems such as small adjustment range, and achieve the effects of good integration, compact structure and good control performance.

Active Publication Date: 2009-01-21
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This device can only adjust three degrees of freedom, and the adjustment range is small

Method used

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  • Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform
  • Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform
  • Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform

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Embodiment Construction

[0019] The following is based on Figure 1 to Figure 7 A preferred embodiment of the present invention is given and described in detail for the purpose of making it easier for those skilled in the art to understand the structural features of the present invention, rather than to limit the scope of the present invention.

[0020] The invention provides a two-degree-of-freedom motor actuator and a corresponding six-degree-of-freedom micro-motion stage. Such as figure 2 The two-degree-of-freedom motor actuator is shown, and three such actuators are evenly distributed on the base at 120° (such as Figure 5 , Figure 6 , Figure 7 ), which can form a six-degree-of-freedom micro-motion table. The micro-motion stage realizes the six-degree-of-freedom adjustment with small stroke, that is, the horizontal movement in X, Y, and Z directions and the rotational movement in θx, θy, θz. The vertical adjustment stroke is ±1.5mm, the horizontal adjustment stroke is ±1.5mm, the positioni...

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Abstract

The invention discloses a two-freedom motor execution mechanism and a six-freedom micro-motion stage thereof. The two-freedom motor execution mechanism comprises a base, a voice coil motor, two horizontal linear motors and horizontal motor guide rails, wherein the voice coil motor and each horizontal linear motor are respectively provided with a stator and a rotor, the base is fixedly connected with the stator of the voice coil motor, the rotor of the voice coil motor is connected with the horizontal motion guide rails via an air floatation decouple unit, the two horizontal linear motors are symmetrically arranged according to the central shaft of the two-freedom motor execution mechanism, whose stators are fixedly connected with the base and the rotors are fixedly connected with the horizontal motion guide rails. The six-freedom micro-motion stage comprises three two-freedom motor execution mechanisms mounted on a base and distanced of 120 degrees. The invention uses integrated two-freedom motor execution mechanisms to realize the six-freedom adjustment of the micro-motion stage, having high adjusting accuracy, high integrality, good control property and compact structure.

Description

technical field [0001] The invention relates to a micro-motion table structure, in particular to a motor actuator and a six-degree-of-freedom micro-motion table using the same. Background technique [0002] The micro-motion table is mainly used in occasions where high positioning accuracy is required, especially small-stroke fine-tuning and positioning under multiple stations, such as semiconductor manufacturing and optical and image alignment. The prior art discloses several micro-motion table structures, but these structures have some shortcomings, which are specifically described as follows: [0003] 1. US Patent US006054784A: This patent discloses a six-degree-of-freedom adjustment principle of an exposure table and its motor layout. The basic principle of this station is to drive the Lorentz motors, distribute the motors for horizontal adjustment at three points of 120°, and distribute the motors for vertical adjustment between the horizontal motors, which is also dist...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 齐宁宁齐芊枫李志龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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