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Scheduling method and program for a substrate treating apparatus

A technology for a substrate processing device and a configuration method, applied in electrical program control, comprehensive factory control, optics, etc., can solve problems such as increased standby time, reduced operation rate, and inability to generate flexible plans

Active Publication Date: 2009-04-01
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] That is, in the existing plan generation method of substrate processing equipment, in order to reduce the standby time and improve the operation rate, it sometimes takes a long time to generate the plan
In addition, in order to prevent the problems caused by this, it is necessary to move the arrangement position of the processing steps of the next batch to be arranged later. As a result, the waiting time may be increased and the operation rate cannot be improved. The problem that the batch group of objects is reduced and cannot generate flexible plans
In addition, the reduction of planning objects also leads to problems such as a decrease in the operating rate

Method used

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  • Scheduling method and program for a substrate treating apparatus
  • Scheduling method and program for a substrate treating apparatus
  • Scheduling method and program for a substrate treating apparatus

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Embodiment Construction

[0217] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0218] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0219] FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment.

[0220] The substrate processing apparatus is, for example, an apparatus for performing chemical solution processing, cleaning processing, and drying processing on the substrate W. A plurality of (for example, 25) boards W in a horizontal posture are accommodated in the FOUP in a standing posture with respect to a FOUP (Front Opening Unified Pod: front opening pod) 1 . The FOUP 1 containing unprocessed substrates W is placed on the input unit 3 . The input unit 3 has two loading tables 5 on which the FOUP 1 is loaded. A take-out unit 7 is provided on a side opposite to the input unit 3 across the cente...

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Abstract

This invention provides a scheduling method for substrate treating apparatus and program thereof. A controlling section orderly processes each train in each treating section according to a procedure including a plurality of treating steps so as to determine and order of treating each train when a plurality of trains is treated by the substrate treating apparatus having a plurality of treating units for treating the substrates. The method includes: executing a basic configuration method and a first configuration method so as to generate several plans, and selecting a plan that finishes the plan in a schedule time, wherein two steps are executed by the controlling section.

Description

technical field [0001] The present invention relates to a method for generating a schedule of a substrate processing apparatus for performing predetermined processes such as cleaning, etching, and drying on a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter referred to as the substrate) and its program. Background technique [0002] In this conventional method, when a plurality of batches (lots) are processed by a substrate processing apparatus having a plurality of processing sections, each processing section sequentially processes each lot according to a recipe (recipe) including a plurality of processing steps For batch groups, the control unit predetermines the processing order of each batch group, and performs processing sequentially while transporting each batch group according to the plan, wherein the processing unit is used to process the substrates. [0003] Specifically, based on a genealogy chart (pedigree map) showing comb...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418H01L21/00G02F1/1333
CPCY02P90/02
Inventor 山本真弘山田大吾
Owner DAINIPPON SCREEN MTG CO LTD
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