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Method of forming alignment mark

A technology for aligning marks and substrates, applied in the direction of exposure devices, instruments, electrical components, etc. in the photoengraving process, which can solve the problems of complex manufacturing processes, inability to locate patterns, and unsuitable for forming through holes, and achieve the effect of a simple structure.

Inactive Publication Date: 2011-02-02
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, depending on the substrate, there are cases where it is not suitable for forming through-holes
In this case, there is a problem that the positioning of the patterns formed on both sides of the substrate cannot be performed.
In addition, even with substrates capable of forming through-holes, there is a problem that a processing device such as a drill is required to form the through-holes, and the manufacturing process becomes complicated.

Method used

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  • Method of forming alignment mark
  • Method of forming alignment mark
  • Method of forming alignment mark

Examples

Experimental program
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Embodiment Construction

[0066] Hereinafter, embodiments of the present invention will be described based on the drawings. figure 1 It is a perspective view of the alignment mark forming apparatus 10 which concerns on 1st Embodiment of this invention.

[0067] The alignment mark forming apparatus 10 is used to form punch marks, which are used on the substrate 100 (refer to image 3 ), the alignment mark forming device 10 has a pedestal 14 loaded on a gantry 13, a workbench 11 for loading a substrate 100, and a workbench 11 for loading a substrate 100 on the workbench. 11, three positioning pins 21 for positioning the substrate 100, three punch forming portions 31a, 31b, and 31c as alignment mark forming portions (when collectively referring to them, they are simply referred to as “slash forming portions 31”), And the inclined plate 12.

[0068] The three punch forming portions 31 are used to form punch marks as alignment marks at three positions on the rectangular substrate 100 . That is, the recta...

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PUM

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Abstract

The present invention provides an aligning mark forming device which has a simple structure and can position the patterns formed on two sides of substrate at a state that a through hole is not used. The aligning mark forming device (10) is provided with a worktable (11) which is used for loading the substrate, three positioning pins (21) which are used for positioning a substrate loaded on the worktable (11), three aligning mark forming parts (51) and an inclining plate (12). Each aligning mark forming part (51) is provided with a pair of exposure parts which are respectively installed on thesurface side and back side of substrate loaded on the worktable (11). The pair of exposure parts forms an aligning mark through irradiating UV light on the noneffective area of substrate.

Description

technical field [0001] The present invention relates to an alignment mark forming apparatus for forming alignment marks for positioning of patterns formed on both surfaces of a substrate. Background technique [0002] For example, Patent Document 1 discloses that when positioning a pattern between multilayer substrates, a through hole, a printed pattern, a concave portion, and the like are used. Here, as described in Patent Document 1, in order to position the pattern on the surface of the multilayer substrate, through holes, printed patterns, recesses, etc. can be used, but in order to position the patterns formed on both sides of the substrate, it is necessary to Take advantage of the through-holes among these. [0003] Patent Document 1: International Publication WO02 / 039793 [0004] However, depending on the substrate, it may not be suitable for forming the through hole. In this case, there arises a problem that the positioning of the patterns formed on both surfaces ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00G03F9/00G03F7/20H05K3/00
Inventor 原望城田浩行中岛直人
Owner DAINIPPON SCREEN MTG CO LTD