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Excimer lamps

A technology of excimer lamps and particles, applied in the field of excimer lamps, can solve problems such as uneven illumination distribution, and achieve uniform illumination distribution, consistent fluidity, and uniform dispersion

Active Publication Date: 2009-04-15
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the excimer lamp provided with the above-mentioned ultraviolet reflective film, it was found that the problem of non-uniform illuminance distribution in the axial direction of the discharge vessel occurs.

Method used

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  • Excimer lamps
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Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0053] according to figure 1 In the configuration shown, eight types having the same configuration were produced except that the ratio D1 / D2 of the central particle diameter D1 of the silica particles in the ultraviolet reflection film to the central particle diameter D2 of the alumina particles was changed according to Table 1 below. excimer lamps. The basic configuration of each excimer lamp is as follows.

[0054] (Constitution of Excimer Lamp)

[0055] The size of the discharge vessel is 10 x 40 x 900 mm and the thickness is 3 mm.

[0056] The gas for discharge enclosed in the discharge vessel was xenon gas, and the enclosed amount was 50 kPa.

[0057] The dimensions of the high voltage supply electrode and the ground electrode are 30×800 mm.

[0058] The light emitting length of the excimer lamp is 800 mm.

[0059] The ratio of particles having a central particle size among the silica particles constituting the ultraviolet reflection film was 50%. The ratio of part...

experiment example 2

[0067] Except that the emission length was 1600mm, it had the same configuration as Experimental Example 1, and the ratio D1 / D2 of the central particle diameter D1 of the silica particles of the ultraviolet reflection film to the central particle diameter D2 of the alumina particles was determined according to the following Table 2. Instead, eight types of excimer lamps were manufactured, and the same experiment as in Experimental Example 1 was performed to investigate the relative illuminance distribution of each excimer lamp. The results are shown in Table 2 below.

[0068] [Table 2]

[0069]

[0070] From the above results, it can be confirmed that regardless of the size of the light emission length of the excimer lamp, an ultraviolet reflection film is formed by mixing silica particles whose central particle diameter is 0.67 times or more the central particle diameter of alumina particles as silica particles. The excimer lamps 9 to 14 can make the relative illuminance ...

experiment example 3

[0072] The ultraviolet reflective film is formed of silica particles with a central particle diameter (D1) of 0.3 μm and alumina particles (D1 / D2=1.00) with a central particle diameter (D2) of 0.3 μm. The ultraviolet reflective film whose ratio was changed to 0wt%, 10wt%, 33wt%, and 50wt% was formed in the film thickness of 30 micrometers on the flat silica glass base material, and four kinds of test pieces were produced.

[0073] And, for each test piece, when the ultraviolet reflective film was heated to 1000°C, [ image 3 The straight line (イ) shown by the dotted line in image 3 The reflected light intensity of each light with a wavelength of 170 nm of the straight line (□) shown by the dotted line in . The results are shown in image 3middle. Here, 1000°C, which is the heating temperature of the ultraviolet reflective film, corresponds to the firing temperature when forming the ultraviolet reflective film, and 1300°C corresponds to the heating temperature when plasma a...

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Abstract

The present invention avoids a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultraviolet reflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.

Description

technical field [0001] The present invention relates to an excimer lamp comprising a discharge vessel made of silica glass, a pair of electrodes are provided sandwiching the silica glass forming the discharge vessel, and an excimer is generated inside the discharge vessel. discharge. Background technique [0002] In recent years, for example, by irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass and other materials, the treated object is treated under the action of the vacuum ultraviolet light and the ozone generated thereby. The technology of the object, such as cleaning treatment technology to remove organic pollutants adhering to the surface of the object to be processed, or oxide film formation treatment technology to form an oxide film on the surface of the object to be processed, and put these technologies into practical use. [0003] As a device for irradiating vacuum ultraviolet light, for example...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/35F21V7/22
Inventor 藤泽繁树森本幸裕
Owner USHIO DENKI KK
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