Full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation

Abstract

The invention discloses a full-flexibility three-translation mixed-connection micro-active device used for in-situ observation of a scanning electron microscope. The device comprises bases (1, 2), a sample platform (3), a microscopic head bracket (4) and piezoelectric ceramic micro-driver (5a, 5b and 5c); the microscopic head bracket (4) is arranged above the sample platform (3); the full-flexibility three-translation mixed-connection micro-active device is a mixed-connection mechanism which is formed in a way that a two-degree of freedom (DOF) full-flexibility plane parallel mechanism is connected with a single-DOF full-flexibility mechanism in series; the two-DOF full-flexibility plane parallel mechanism is a micro-active translation structure in x-direction and y-direction; the single-DOF full-flexibility mechanism is a micro-active translation mechanism in z-direction. The full-flexibility three-translation mixed-connection micro-active device generates no pollution caused by the volatilization of the introduced lubricant, avoids the defects of vibration impact, friction abrasion and the like, avoids the accumulation of all errors during the testing process, and can meet the high-precision requirement.

Description

technical field [0001] The invention relates to a three-translation micro-movement device for in-situ observation of a scanning electron microscope using a fully flexible hybrid mechanism combined with a piezoelectric ceramic micro-drive system, belonging to the field of in-situ testing of material structure and performance. Background technique [0002] In the field of engineering materials, the research of high-performance micro-nano magnetic materials and magnetic information recording materials has always been a hot spot. Using scanning electron microscopy to observe the fracture performance and friction performance of materials after being scratched is one of the common methods for studying materials. However, at present, the scanning electron microscope can only observe the static microscopic image after the material crack expands or the material rubs against each other. However, the dynamic performance changes in the scratching process of materials, such as the phase ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a fully flexible three-translation hybrid micro-motion device for in-situ observation by scanning electron microscope, which can solve the technical defects of lubricant pollution and inability to meet high precision requirements in the prior art

Images