Full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation

A micro-movement device, scanning electron microscope technology, applied in the direction of measurement device, mechanical device, strength characteristics, etc., can solve the problems of inability to meet high-precision requirements, lubricant pollution, etc., to avoid vibration shock and avoid the accumulation of various errors , The effect of meeting high precision requirements

Inactive Publication Date: 2009-04-22
JIANGSU UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to provide a fully flexible three-translation hybrid micro-motion device for in-situ observation by scann

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  • Full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation
  • Full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation
  • Full flexible three-translational series-parallel connection fine motion device of scanning electron microscope home position observation

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Example Embodiment

[0015] As shown in the figure, the present invention includes a base 1, 2, a sample stage 3, a micro indenter holder 4, and piezoelectric ceramic micro-drivers 5a, 5b, 5c. The micro indenter holder 4 is located above the sample table 3 and can be fastened. Installed on the base 1, as shown in the screw 7 to install the micro indenter bracket 4 on the base 1, the micro indenter can be a diamond micro indenter. The fully flexible three-translational hybrid micro-motion device is composed of a two-degree-of-freedom fully-flexible planar parallel mechanism and a single-degree-of-freedom fully flexible mechanism in series to form a hybrid mechanism. The two-degree-of-freedom fully flexible planar parallel mechanism is x, y Micro-movement translation structure, single-degree-of-freedom fully flexible mechanism is z-direction micro-movement translation structure. The said x, y-direction micro-motion translation structure is composed of x, y-direction base 2, sample stage 3, piezoelectric...

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Abstract

The invention discloses a full-flexibility three-translation mixed-connection micro-active device used for in-situ observation of a scanning electron microscope. The device comprises bases (1, 2), a sample platform (3), a microscopic head bracket (4) and piezoelectric ceramic micro-driver (5a, 5b and 5c); the microscopic head bracket (4) is arranged above the sample platform (3); the full-flexibility three-translation mixed-connection micro-active device is a mixed-connection mechanism which is formed in a way that a two-degree of freedom (DOF) full-flexibility plane parallel mechanism is connected with a single-DOF full-flexibility mechanism in series; the two-DOF full-flexibility plane parallel mechanism is a micro-active translation structure in x-direction and y-direction; the single-DOF full-flexibility mechanism is a micro-active translation mechanism in z-direction. The full-flexibility three-translation mixed-connection micro-active device generates no pollution caused by the volatilization of the introduced lubricant, avoids the defects of vibration impact, friction abrasion and the like, avoids the accumulation of all errors during the testing process, and can meet the high-precision requirement.

Description

technical field [0001] The invention relates to a three-translation micro-movement device for in-situ observation of a scanning electron microscope using a fully flexible hybrid mechanism combined with a piezoelectric ceramic micro-drive system, belonging to the field of in-situ testing of material structure and performance. Background technique [0002] In the field of engineering materials, the research of high-performance micro-nano magnetic materials and magnetic information recording materials has always been a hot spot. Using scanning electron microscopy to observe the fracture performance and friction performance of materials after being scratched is one of the common methods for studying materials. However, at present, the scanning electron microscope can only observe the static microscopic image after the material crack expands or the material rubs against each other. However, the dynamic performance changes in the scratching process of materials, such as the phase ...

Claims

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Application Information

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IPC IPC(8): G01N21/88G01N21/84G01N3/00G01N19/00
Inventor 杨启志杨海波马履中尹小琴
Owner JIANGSU UNIV
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