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Dark field illumination objective lens apparatus

A technology for illuminating objective lenses and illuminating devices, applied in microscopes, optics, instruments, etc., can solve problems such as the change of the focal length of the light source without consideration, and achieve the effect of improving inspection capabilities and improving work efficiency

Active Publication Date: 2010-08-11
南京东利来光电实业有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the light source is set up in the microscope, the change of the focal length of the objective lens with different magnifications and the light source is not considered

Method used

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  • Dark field illumination objective lens apparatus
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0036] FIG. 1 is a cross-sectional view showing a dark field illumination objective lens device according to Embodiment 1 of the present invention.

[0037] This embodiment is composed of an inner cylinder 1 and an outer cylinder 2 whose axes coincide. A lens group 3 for imaging is installed in the inner cylinder 1. The outer diameter of the inner cylinder 1 facing the object to be observed is d (the inner diameter of the ring), which is equivalent to the outer diameter of the bright field lens when the objective lens is used for observation in the bright field. The axis of the outer cylinder 2 is the same as that of the inner cylinder 1. There is an annular space between the outer tube 2 and the inner tube 1. From top to bottom in the annular space are the annular battery 4, the substrate 5 on which the LED element is mounted, the LED element 6, and the compensation lens 7 to improve the parallelism of the LED emitted light, which converts the illumination light emitted by the...

Embodiment approach 2

[0046] Refer to the dark field illumination objective lens device using an aspherical mirror 13 shown in FIG. 3. Except for the spherical mirror 13, the rest of the structure is the same as the first embodiment, so the description of the parts other than the aspheric mirror is omitted here.

[0047] In the second embodiment, similar to the first embodiment, the illumination area S satisfies S≤(Dd), where D and d are the inner diameter of the outer cylinder and the outer diameter of the inner cylinder (the outer diameter of the inner cylinder holding the imaging lens group) ). In addition, the distance L between the LED element 6 and the aspheric mirror 13 preferably satisfies L> 3.3(D-d).

[0048] The aspheric mirror 13 forms a tire surface, and converts incident light into parallel light in the meridian plane. Therefore, the aspherical mirror 13 converts the illuminating light emitted by the LED elements arranged in a ring into parallel light in the sub-object plane, and irradia...

Embodiment approach 3

[0050] Hereinafter, with reference to FIG. 4, an embodiment in which the illuminating light emitted by the LED element is obliquely irradiated onto the illuminating area S using a ring-shaped tire surface lens to realize an objective lens device for dark field observation will be described in detail.

[0051] 4 is a cross-sectional view of a dark-field illumination objective lens device with a tire rim lens 14 installed at the front end of an outer cylinder. In the third embodiment, the LED mounting method is different from the first and second embodiments. In order to make the light emitted by the LED element directly obliquely irradiate the illumination area S without turning the optical axis, the tip of the outer tube 2 accommodating the LED element With respect to the inner cylinder 1, the part is in a conical shape that is opened. That is, the outer tube 2 extends from the middle of the inner tube 1 to the front end in an umbrella shape, and is used for mounting and fixing t...

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Abstract

The invention relates to a dark view field object lens device which illumines the observed objects at the dark view field and used in a dark view field microscope utilizing the scattering and diffraction of the objects to observe. More particularly, the invention relates to a lighting and mounting structure of the dark view field object lens device. The object lens contains an inner cylinder and an outer cylinder. A combination of lenses used for imaging is installed inside the inner cylinder; an LED illuminating apparatus which is arranged in a ring shape and takes an LED original piece as light source is arranged at the outer side of the outer cylinder. In addition, an optical element which is arranged between the LED original piece and the observed objects transforms the light of LED in a meridian plane into parallel light and leads the parallel light to light the observed objects in an inclined way. The light emitted by the LED original piece is transformed into parallel light to light the observed objects in the meridian plane. After the image of the light scattered and diffracted by the observed objects is formed by an imaging object lens, the image is processed after being observed by using an eyepiece and shot by a camera. Screw thread is arranged at the periphery of the end part of the inner cylinder of the dark view field object lens device, so that the dark view field object lens device can be directly installed on a change over panel of a bright field microscopical. Therefore, the bright field microscopical can be directly switched for the observation of the dark view field.

Description

Technical field [0001] The invention relates to a dark-field objective lens device used in a dark-field microscope that performs dark-field illumination on an observation object and uses scattered and diffracted light of the object for observation. Background technique [0002] When inspecting integrated circuit (IC) patterns, scratches and dust on the surface of liquid crystal glass, it is more advantageous to use dark field illumination, so it is usually observed under dark field illumination. Different from the bright-field illumination that illuminates the observed object along the optical axis, dark-field illumination projects the illumination light from the side and oblique direction onto the observed object, and the objective lens receives and observes the diffracted and scattered light of the observed object. [0003] The objective lens for dark field illumination has the following problems. In addition to the optical system of the microscope, an illuminating device is nee...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/10G02B21/02
CPCG02B21/084
Inventor 赵跃东
Owner 南京东利来光电实业有限责任公司
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