Field emission type electronic source and manufacturing method thereof

An electron source, field emission technology, applied in cathode ray tube/electron beam tube, electrode system manufacturing, discharge tube/lamp manufacturing, etc. It is difficult to solve problems such as electron source, so as to achieve the effect of increasing the voltage and increasing the insulation distance
CN101452797AActive Publication Date: 2009-06-10TSINGHUA UNIV +1
0 Cites 9 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TSINGHUA UNIV
Publication Date
2009-06-10

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a field emission electron source, which comprises an insulation substrate. A cathode emission electrode is arranged on the insulation substrate and comprises a cathode electrode and a cathode emitter arranged on the cathode electrode; an isolated body is arranged on the insulation substrate; and a metal grid mesh is arranged on the isolated body and further extends above the cathode emission electrode, wherein the isolated body and the cathode electrode are arranged at intervals. A method for preparing the field emission electron source comprises the following steps: providing an insulation substrate; preparing a cathode emission electrode on the insulation substrate, wherein the cathode emission electrode comprises a cathode electrode and a cathode emitter arranged on the cathode electrode; preparing a prefabricated body of the isolated body on the insulation substrate and exposing the prefabricated body of the isolated body; manufacturing a metal grid mesh on the prefabricated body of the isolated body; removing the exposed part of the prefabricated body of the isolated body and arranging the isolated body and the cathode electrode at intervals; therefore, the field emission electron source is obtained.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to an electron source and a preparation method thereof, in particular to a field emission electron source and a preparation method thereof. Background technique

[0002] The field emission electron source is an electron source that uses electrons escaping from the surface of solid materials to achieve electron emission under the action of an external field. The field emission electron source works at low temperature or room temperature. Compared with the thermal emission electron source in the electric vacuum device, it has the advantages of low energy consumption, fast response speed and low discharge. Therefore, the field emission electron source is used to replace the thermal emission in the electric vacuum device. Electron sources have become a hotspot of research.

[0003] Early field emission electron sources used Spindt microtip structures as field emission arrays. This electron source manufactured based on micro-nano pro...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More