Method and device for wafer optimized scheduling

A technology that optimizes scheduling and wafers, and is used in control/regulation systems, program control, and overall factory control to achieve high benefits, reduce production costs, and reduce computing consumption.
CN101459098AActive Publication Date: 2009-06-17BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
Publication Date
2009-06-17

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Abstract

The invention provides a method of wafer optimal scheduling. The steps of the method comprise obtaining the quantity of wafers needed to be operated in a system and the technique sequence of each wafer, analogously calculating operating paths of a plurality of wafers according to the quantity of the wafers and the technique sequence of each wafer, wherein the path is moving sequence aggregation of each wafer in time, evaluating the operating paths of the pluralities of wafers according to the technique time efficiency of the system, taking the path with the maximum processing time efficiency of the system as the optimal path to store into a scheduling sequence, and scheduling each wafer according to paths in the scheduling sequence. The invention performs n steps simulation to all potential scheduling sequences of the system through constructing the function of the technique time efficiency of the system, and can obtain the optimal path through further analysis. Therefore, the scheme of the invention can increase the productivity of the system and reduce the manufacturing cost, thereby bringing higher benefits for manufacturers.
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Description

technical field

[0001] The invention relates to the technical field of process data processing, in particular to a method and device for wafer optimization scheduling in the semiconductor manufacturing industry. Background technique

[0002] The best quality, the lowest manufacturing cost, quick response and flexibility are the key factors for the development of semiconductor manufacturing enterprises.

[0003] The production planning and scheduling system can help semiconductor manufacturing enterprises realize these factors to a certain extent. Scheduling system is an important link to realize the optimization of production management of semiconductor manufacturing enterprises, and an indispensable part of realizing enterprise informatization. The present invention is proposed aiming at realizing wafer scheduling optimally during the wafer processing process in the semiconductor manufacturing industry.

[0004] For example, in the wafer production process, an important l...

Claims

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