Ultra-discrimination differential confocal microscope with macro-micro view field observation

Abstract

The invention belongs to the technical field of optical microscopic imaging and optical precision measurement and relates to a super-resolution differential con-focal microscope with both macro field coverage observation and micro field coverage observation. The invention mainly comprises a laser (1), a beam expander (2), a spectroscope (4), a polarization spectroscope (5), a range extension tracking and measuring system (6), a measuring objective lens (7), two optical collectors (16) and (19), pinholes (17) and (20), detectors (18) and (21), an LED light emitting diode (12) which is arranged in a direction opposite to the reflection direction of the spectroscope and a CCD detector (11) which is arranged in a direction opposite to the reflection direction of a spectroscope (9). The LED light emitting diode and the CCD detector are used for realizing macro-field coverage observation of a con-focal microscope through imaging the surface type of the detected samples, and the axial resolution power of the con-focal microscope can be raised through deploying the optical path of the differential con-focal microscope.

Description

technical field [0001] The invention belongs to the technical field of optical microscopic imaging and optical precision measurement, and relates to a super-resolution differential confocal microscope with both macro-micro viewing field observation, which can be used for three-dimensional surface topography, three-dimensional microstructure, micro-steps, High-precision measurement of micro-grooves, micro-displacements, and line widths of integrated circuits. technical background [0002] In 1957, scholars such as M.Minsky in the United States first proposed the idea of ​​confocal microscopy in the study of optimizing the design of the microscope and trying to eliminate stray light, and was authorized by the US Patent Office in 1961, with the patent number US3013467. The imaging principle of the confocal microscope is to place the point light source, the point object to be measured, and the point detector in the corresponding conjugate position, which constitutes a tomographi...

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Problems solved by technology

However, the combination of optical imaging technology and CCD detection technology, the image analysis method is used to roughly align the sample position of the differential confocal microscope, and then realize the observation of the confocal microscope in the macroscopic field of view. So far, there has been no report.

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