Top module installing and adjusting mechanism for illumination

A technology for installation, adjustment, and frame adjustment, which is applied to lighting devices, lighting auxiliary devices, and components of lighting devices. The effect of high repeatability of positioning and improved processability

Active Publication Date: 2009-08-19
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantages of the installation structure of the lighting top module of this lithography machine are: 1. In order to expose the lens to be cleaned, the lighting top module needs to have a large turning space, which requires a relatively large space, and the lens cannot be fully exposed. Not enough space for cleaning operation can be reserved, which brings inconvenience to the cleaning work
2. The positioning device cannot be adjusted, and its installation and positioning accuracy is poor, so the processing accuracy of its installation seat plate is required to be high
3. The manual return type is adopted, and the degree of automation is low

Method used

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  • Top module installing and adjusting mechanism for illumination
  • Top module installing and adjusting mechanism for illumination
  • Top module installing and adjusting mechanism for illumination

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Embodiment Construction

[0027] Below in conjunction with accompanying drawing, the present invention is described clearly and completely:

[0028] The installation and adjustment mechanism of the lighting top module in this embodiment, please refer to Figure 4-9 . Figure 4-9 Middle: 10—lighting bottom module, 11—lighting frame, 12—lighting top module, 13—installation seat plate, 14—(projection objective lens) lens, 15—projection objective lens, 16—moving guide rail, 17—moving cylinder, 18— Lifting cylinder, 19—first fastening screw, 20—unlocking cylinder, 21—lock hook, 22—torsion spring, 23—lock hook support plate, 24—adjustment frame, 25—second fastening screw, 26—lock Tightening screw, 27—locating seat, 28—locating pin, 29—adjusting gasket, 30—adjusting screw, 31—connecting seat plate, 32—hydraulic buffer, 33—slider.

[0029] see Figure 4 This lighting top module installation adjustment mechanism includes a mounting seat plate 13, an adjustment and positioning device is arranged between the m...

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PUM

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Abstract

The invention discloses a mounting regulation mechanism for an illumination top module, comprising a mounting base plate, a positioning regulation device is arranged between the mounting base plate and the illumination top module, a vertical movement and horizontal movement combined transferring device for transferring the illumination top module is also arranged between the mounting base plate and the illumination top module. The mounting regulation mechanism applies a dramatic improvement to the present mounting and positioning regulation device for the illumination top module and replaces the vertical movement and manual rotation combined transferring device with the vertical movement and horizontal movement combined transferring device, thus effectually reducing the movable space as required by cleaning the illumination top module of a lens, moreover, the lens of a projection objective can be completely exposed, thus facilitating the cleaning operation of the lens. The positioning regulation device can regulate the illumination top module in six directions of degree of freedom, and can remain high repetitive positioning precision subsequent to each movement, therefore, the requirement of the processing precision of the mounting base plate is reduced.

Description

technical field [0001] The invention belongs to the field of semiconductor production, and in particular relates to an installation and adjustment mechanism for an illumination top module in a lithography machine, which is used for installing, adjusting and maintaining the illumination top module in a lithography machine. Background technique [0002] After the lithography machine has been working for a period of time (about one month), the lens on the upper part of the projection objective needs to be scrubbed and cleaned. When scrubbing and cleaning the lens, the lighting top module must be removed, so that the upper lens of the projection objective lens is completely exposed for scrubbing and cleaning the lens. After the cleaning work is completed, the lighting top module needs to be reset, and its position accuracy should be guaranteed, that is, it should have high repeat positioning accuracy. [0003] At present, the installation structure of the lighting top module of...

Claims

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Application Information

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IPC IPC(8): F21V14/02F21V19/02F21V21/34G03F7/20
Inventor 程德胜
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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