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Crucible holding member and method for producing the same

A technology for holding parts and crucibles, which is applied in chemical instruments and methods, textiles and papermaking, and self-melting liquid pulling methods, etc., and can solve problems such as carbon fiber breakage

Inactive Publication Date: 2009-09-02
IBIDEN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] During these steps, the carbon fibers are also subjected to strong tension due to the difference in thermal expansion coefficient between the forming die and the crucible made of C / C composites, which may cause the fracture of the carbon fibers

Method used

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  • Crucible holding member and method for producing the same
  • Crucible holding member and method for producing the same
  • Crucible holding member and method for producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0074] First, a forming die for manufacturing a mesh body is prepared. Six side panels (600mm wide, 850mm long and 200mm thick) made of graphite were prepared. The intersection angle of each side plate is designed to be 60 degrees, and the side plates are bonded to each other with graphite material adhesive (COPNA resin) to form a hollow hexagonal cylinder. Next, two bottom plates (736 mm wide, 17000 mm long, and 200 mm thick) made of graphite were prepared, and bonded to the end face of the hollow hexagonal cylinder using an adhesive for graphite material (COPNA resin), thereby forming a rough Forming die. Then, the outer peripheral surface of the main body part of this rough forming die was ground into a cylindrical shape, and the outer peripheral surface of its bottom part was ground into a bowl shape, thereby manufacturing a forming die (1400 mm in diameter, 600 mm in height)

[0075] Next, using 140 ribbon-like strands for each of the first, second, and longitudinal str...

Embodiment 2

[0078] A cylindrical forming die was used instead of the forming die in Example 1 above to manufacture a mesh body. The cylindrical forming die was produced by the following method. First, 6 side plates (600 mm wide, 850 mm long and 200 mm thick) made of graphite were prepared. The intersection angle of each side plate is designed to be 60 degrees, and each side plate is bonded to each other with a graphite material adhesive (COPNA resin) to form a rough forming mold in the shape of a hollow hexagonal cylinder. Then, the outer peripheral surface of this rough forming die was ground into a cylindrical shape to manufacture a forming die (1400 mm in diameter and 600 mm in height).

[0079] Next, using 140 ribbon-like strands for each of the first, second, and longitudinal strands, a triaxial braided mesh body was manually formed on the outer peripheral surface of the forming die. Each strand is composed of 24000 carbon filaments (manufactured by Toray Industries, Inc., trade na...

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Abstract

A crucible holding member for holding a quartz crucible for containing a silicon melt is provided. The crucible holding member includes: a mesh body formed by weaving a plurality of strands, each including a plurality of carbon fibers; and a matrix filled in the interstices between the carbon fibers. The mesh body has a triaxial weave structure including: a plurality of longitudinal strands aligned in a same plane as a central axis of the mesh body; a plurality of first strands aligned in a first direction inclined at a first angle with respect to the central axis; and a plurality of second strands aligned in a second direction inclined at second angle same as the first angle with respect to the central axis. The first direction is opposite to the second direction with respect to the central axis.

Description

[0001] Cross References to Related Applications [0002] This application claims priority from Japanese Patent Application No. 2008-044673 filed on February 26, 2008, the entire subject matter of which is hereby incorporated by reference. technical field [0003] The present invention relates to a crucible holding member for holding a quartz crucible for pulling a silicon single crystal. Background technique [0004] So far, carbon materials have been widely used in silicon single crystal pulling equipment because carbon materials have high heat resistance and high thermal shock resistance, and carbon materials hardly contaminate silicon. In particular, isotropic graphite material is difficult to react with reactive gas such as SiO generated in equipment due to its high density, and isotropic graphite material is compatible with quartz crucibles for containing silicon melts. Material SiO 2 The reaction rate is low. Therefore, an isotropic graphite material has been used a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/10C04B35/83
CPCC04B2235/616C30B15/10C30B35/002D04C1/02C04B2237/76C04B2235/5256C04B35/6269C04B35/83C04B2237/704C04B2237/361C04B2237/78C04B37/008Y10T117/10D06M2101/40
Inventor 加藤秀树鹿野治英安藤友行安田正弘
Owner IBIDEN CO LTD