Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

An acceleration transducer based on nano-resonator and method of producing the same

An acceleration sensor and resonator technology, applied in the field of sensors, can solve problems such as performance limitations, achieve high electromechanical conversion efficiency, high sensitivity measurement, and improve resolution and accuracy

Inactive Publication Date: 2009-10-07
TSINGHUA UNIV
View PDF0 Cites 18 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem to be solved by the present invention is to provide a nano-resonator-based acceleration sensor and its manufacturing method to overcome the performance limitations of existing micro-electromechanical resonant acceleration sensors

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • An acceleration transducer based on nano-resonator and method of producing the same
  • An acceleration transducer based on nano-resonator and method of producing the same
  • An acceleration transducer based on nano-resonator and method of producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0023] The structure of an acceleration sensor based on a nano-resonator in an embodiment of the present invention is as follows figure 1 As shown, its side view along the A-A line section is as follows figure 2 shown. The acceleration sensor includes a base 1, a mass block 2 and four support beams 3-6, the suspended mass block 2 is connected to the base 1 through four support beams 3-6, and the base, mass block and four support beams are heavily mixed Heterogeneous single crystal silicon material. An insulating layer 7 is covered on the single crystal silicon, and the insulating layer 7 can be made of materials such as silicon dioxide or silicon nitride. Eight pairs ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention discloses an acceleration transducer based on nano-resonator, including four supporting beams, mass block and basement, which are covered by insulation layer, the impending mass block is connected with the basement via four supporting beams; upper the insulation layer ends of the four supporting beams are provided with eight pair electrodes, nano-resonant beams are respectively related joint and fixed to the corresponding electrode couple, the nano-resonant beam applies semiconductor nano-wire or semiconductor nano-tube; the nano-resonant beam, upper metallic electrode couple and the lower silicon electrode constitute field-effect tranisistor structure, the lower silicon electrode and the upper metallic electrode couple is separated by insulation layer, and the upper metallic electrode couple are respectively source and drain, the lower silicon electrode is gate electrode. The invention also discloses a method of producing the acceleration transducer and method of measuring acceleration by using the acceleration transducer. The invention applies the semiconductor nano-wire or semiconductor nano-tube as the nano-resonant beam to implement high-sensitivity measurement of transducer via frequency mixing phase-lock technique.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an acceleration sensor based on a nano-resonator and a manufacturing method thereof. Background technique [0002] Miniature, high-performance inertial sensors have a wide range of application requirements in aviation, aerospace, vehicles, ships, robots and other industries, and micro accelerometers are one of them. According to the working principle, there are many types of micro accelerometers, such as capacitive, piezoresistive, resonant, tunnel effect and so on. Among them, the resonant acceleration sensor has been recognized as a high-sensitivity sensor. The basic working principle of the resonant acceleration sensor is: under the action of acceleration, the inertial force caused by the mass block is transformed into the stress on the resonant beam. Therefore, under the condition of resonance, the change of the resonant frequency of the resonant beam reflects the magnitude ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01P15/097B82B1/00B82B3/00
Inventor 朱荣
Owner TSINGHUA UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com