An acceleration transducer based on nano-resonator and method of producing the same

An acceleration sensor and resonator technology, applied in the field of sensors, can solve problems such as performance limitations, achieve high electromechanical conversion efficiency, high sensitivity measurement, and improve resolution and accuracy

Inactive Publication Date: 2009-10-07
TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The problem to be solved by the present invention is to provide a nano-resonator-based acceleration sensor and its ma

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  • An acceleration transducer based on nano-resonator and method of producing the same
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  • An acceleration transducer based on nano-resonator and method of producing the same

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Embodiment Construction

[0022] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0023] The structure of an acceleration sensor based on a nano-resonator in an embodiment of the present invention is as follows figure 1 As shown, its side view along the A-A line section is as follows figure 2 shown. The acceleration sensor includes a base 1, a mass block 2 and four support beams 3-6, the suspended mass block 2 is connected to the base 1 through four support beams 3-6, and the base, mass block and four support beams are heavily mixed Heterogeneous single crystal silicon material. An insulating layer 7 is covered on the single crystal silicon, and the insulating layer 7 can be made of materials such as silicon dioxide or silicon nitride. Eight pairs ...

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Abstract

The present invention discloses an acceleration transducer based on nano-resonator, including four supporting beams, mass block and basement, which are covered by insulation layer, the impending mass block is connected with the basement via four supporting beams; upper the insulation layer ends of the four supporting beams are provided with eight pair electrodes, nano-resonant beams are respectively related joint and fixed to the corresponding electrode couple, the nano-resonant beam applies semiconductor nano-wire or semiconductor nano-tube; the nano-resonant beam, upper metallic electrode couple and the lower silicon electrode constitute field-effect tranisistor structure, the lower silicon electrode and the upper metallic electrode couple is separated by insulation layer, and the upper metallic electrode couple are respectively source and drain, the lower silicon electrode is gate electrode. The invention also discloses a method of producing the acceleration transducer and method of measuring acceleration by using the acceleration transducer. The invention applies the semiconductor nano-wire or semiconductor nano-tube as the nano-resonant beam to implement high-sensitivity measurement of transducer via frequency mixing phase-lock technique.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an acceleration sensor based on a nano-resonator and a manufacturing method thereof. Background technique [0002] Miniature, high-performance inertial sensors have a wide range of application requirements in aviation, aerospace, vehicles, ships, robots and other industries, and micro accelerometers are one of them. According to the working principle, there are many types of micro accelerometers, such as capacitive, piezoresistive, resonant, tunnel effect and so on. Among them, the resonant acceleration sensor has been recognized as a high-sensitivity sensor. The basic working principle of the resonant acceleration sensor is: under the action of acceleration, the inertial force caused by the mass block is transformed into the stress on the resonant beam. Therefore, under the condition of resonance, the change of the resonant frequency of the resonant beam reflects the magnitude ...

Claims

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Application Information

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IPC IPC(8): G01P15/097B82B1/00B82B3/00
Inventor 朱荣
Owner TSINGHUA UNIV
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