Gas distributor and semiconductor processing equipment applying same
A gas distribution and gas technology, applied in the field of microelectronics, can solve the problems of short service life, easy breakage, and difficult processing of gas distribution devices, and achieve the effects of easy processing, strong structure, and simple and convenient processing
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[0060] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the gas distribution device provided by the present invention and the semiconductor processing equipment using the gas distribution device will be described in detail below in conjunction with the accompanying drawings.
[0061] See also image 3 The gas distribution device 100 provided by the first embodiment of the present invention includes a support plate 1, a baffle plate 2, and a shower head electrode 3 which are sequentially stacked from top to bottom.
[0062] Wherein, the support plate 1 is provided with gas inlet passages (101, 102) penetrating the upper and lower surfaces thereof, so as to introduce gas such as process gas to the top of the baffle plate 2 in the gas distribution device 100. In order to better improve the uniformity of the gas distribution in the central area and the edge area of the reaction chamber, the gas distribution device 100...
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