Fully flexible MEMS optical switch

An optical switch, fully flexible technology, used in optics, optical components, instruments, etc., can solve problems such as damage to the optical switch, affecting the rotation angle of the micro-mirror, affecting the optical transmission, etc., achieving low cost, low requirements, and accurate switching. Effect

Inactive Publication Date: 2011-04-06
XIDIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the MEMS optical switch is exchanged by mirror rotation, any mechanical friction, wear or vibration may damage the optical switch
And the "on" state of ordinary MEMS optical switches needs continuous driving force to maintain. If the driving force fluctuates, it will affect the rotation angle of the micro-mirror and ultimately affect the transmission of light and the stability of the link.

Method used

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  • Fully flexible MEMS optical switch
  • Fully flexible MEMS optical switch
  • Fully flexible MEMS optical switch

Examples

Experimental program
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Embodiment Construction

[0016] Such as figure 1 As shown, it includes a flexible bistable mechanism 1 and a micro-mirror 3. The shuttle 5 of the flexible bistable mechanism 1 is connected to a flexible bridge 2. The micro-mirror 3 is fixed to the flexible bridge 2 through a connecting block 8. The flexible bistable mechanism The first stable position and the second stable position of 1 respectively make the micro-mirror 3 in two states of light passing and light reflecting. The flexible bridge 2 is composed of two flexible beams 6 near the bottom and a flexible beam 7 far from the bottom. The two ends of the flexible beam 7 are connected with two sections of flexible beams 6 near the bottom through the connecting block 8; The connecting block 8 of the bottom flexible beam 6 and the far bottom flexible beam 7 is connected with the micro mirror 3 . When the left end of the flexible bridge 2 has a force or displacement input along the direction of the flexible bridge parallel to the substrate, a coupl...

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PUM

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Abstract

The invention relates to an optical switch, in particular to a fully flexible MEMS optical switch, belonging to the technical field of optical fiber communication. The invention is characterized by comprising a flexible bi-stable mechanism (1) and a micro reflector (3), a shuttle (5) of the flexible bi-stable mechanism (1) is connected with a flexible bridge (2), the micro reflector (3) is fixed with the flexible bridge (2) by a connecting block (8), the first stable state position and the second stable state position of the flexible bi-stable mechanism (1) respectively lead the micro reflector (3) to be in a light passing state and a light reflecting state. The invention provides an MEMS switch with simple structure, low manufacture cost, good stability, high repeatability precision, no frictional wearing and strong interference rejection capability.

Description

technical field [0001] The invention belongs to the technical field of optical fiber communication, and relates to an optical switch, in particular to a fully flexible MEMS optical switch. Background technique [0002] Since the optical fiber was introduced into the communication network, it has made important contributions to the development of communication. Due to the huge bandwidth of optical fiber, as an excellent transmission medium, optical fiber communication technology has developed to a new level. At the same time, optical multiplexing technologies, such as wavelength division multiplexing (WDM), time division multiplexing (TDM), and space division multiplexing (SDM), are getting more and more attention and are widely used. However, based on these technologies In the existing communication network, each node of the network needs to complete the conversion of light / electricity and electricity / light, which is restricted by the characteristics of the electronic devic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08
Inventor 陈贵敏勾燕洁贾建援
Owner XIDIAN UNIV
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