Electrothermic driven Fabry-perot light modulator
An electrothermal drive and modulator technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of low display performance of interferometric light modulators, easy pull-in phenomenon in driving, etc., and achieves elimination of pull-in phenomenon and large driving force. , the effect of reducing the requirements of the processing technology
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[0032] The structure and implementation of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0033] Figure 1(a) and Figure 1(b) show the structure of a single FAPO optical modulator, 1 is the glass substrate, 2 is the upper reflector, 3 is the FAPO cavity, 4 is the movable lower reflector, 5 is connected to the electric heater The supporting anchors of the drive beam and the lower reflector, 6 is an electrothermal drive component, and 7 is a silicon substrate. The cross-beam-shaped electrothermal driving part 6 is located on the silicon substrate 7, and the electrothermal driving part 6 is provided with a supporting anchor 5 to connect and support the movable lower reflector 4. The transparent glass substrate 1 is suspended and fixed on the silicon substrate 7 by bonding. On the base 7, the upper reflector 2 is attached to the lower surface of the glass substrate 1, and is opposite to the movable lower reflector 4, and the...
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