Method of designing minute flow rate controller with entrance throttle groove

Abstract

A method of designing a minute flow rate controller that is capable of accurately controlling the minute flow rate of a fluid and realizing desired valve characteristics without inducing any unsteadiness of fluid flow and has a simple configuration with respect to a throttle groove for controlling the fluid flow rate. With respect to a minute flow rate controller comprising inflow passage (12) for introducing a fluid, valve member (2) furnished with main throttle groove (6) for causing the introduced fluid to flow from a starting end toward a finishing end thereof, fluid outflow port (20) opened with an optional cross section by a flow rate regulating member and outflow passage (14) for leading out the fluid flowing out from the fluid outflow port (20), there is provided a method of designing the minute flow rate controller with entrance throttle groove, comprising providing entrance throttle groove (8) communicably preceding the starting end position of the main throttle groove (6), and, on the basis of a relational expression derived from the momentum equation of the fluid flowing through the entrance throttle groove (8) and the main throttle groove (6), determining the size of the entrance throttle groove (8) so as to exhibit a desired flow resistance.

Description

technical field [0001] The present invention relates to a flow control device for controlling the flow rate of liquid and gas, more specifically, it relates to controlling the microscopic flow of fluid (liquid, gas) in micro-sized flow paths, fluid action environments, reactors, etc. Design method of micro-flow control device for flow. Background technique [0002] In recent years, the miniaturization and integration of chemical reaction systems have attracted attention as new technical issues in synthetic chemistry, analytical chemistry, semiconductor industry and bioengineering industry. It plays an important role in the high precision and efficiency of chemical reaction control such as chemical vapor deposition system and synthetic chemical experiment system. In such technological trends, chemical reactions in tiny spaces with reaction volumes ranging from nanoliters to microliters are being promoted, so-called microreactors, to improve reaction yields, shorten reaction ...

AI Technical Summary

Problems solved by technology

Since the flow rate of the needle valve increases rapidly after opening the valve, it is difficult to supply the flow rate to the above-mentioned fine space. For example, the maximum flow rate is 10 mL / min to 1 mL / min for liquid, and 1 to 0.01 sccm for gas. Therefore, it is necessary to develop a new micro-flow control technology suitable for this purpose.

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