Array micro audio directional transducer
A transducer and micro-acoustic technology, applied in the field of MEMS-based transducers and ultrasound, can solve problems such as poor directivity, low receiving sensitivity, and low output power
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[0035] figure 1 Shown is an embodiment of the circular array unit in the present invention, as follows figure 1 As shown, the array unit consists of four parts, the upper electrode 1 , the lower electrode 3 , the ultrasonic radiation material 2 and the base 4 . The upper electrode 1 and the lower electrode 3 fix the radiation material 2 and serve as positive and negative electrodes of the array unit. The upper electrode 1 and the lower electrode 3 are formed by sputtering. This process ensures the stability of the conduction on both sides of the film and the small parasitic resistance. The vibration radiation material 2 is a piezoelectric film material. The piezoelectric film material can be a piezoelectric ceramic film material or a piezoelectric polymer film material. The radiation material 2 requires high mechanical response and electrical response sensitivity. Impedance is required to match air impedance as closely as possible. When a voltage is applied to the electrode...
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