The invention belongs to the technical field of micro-electro mechanic systems (MEMS), and relates to a
piezoelectricity driven
capacitance detecting two-axis
gyroscope. According to the invention, a lower surface of a
gyroscope oscillator with a shape of a round disc, a wheel
spoke or a
honeycomb is connected to a supporting cylinder. The other end of the supporting cylinder is fixed on a
lower pole plate. The
lower pole plate is fixed on a carrier. An upper pole plate
signal detecting
electrode is positioned on a lower end surface of the upper pole plate. A
lower pole plate
signal detectingelectrode is positioned on an upper end surface of the lower pole plate. The upper pole plate, the lower pole plate and the
gyroscope oscillator are assembled, and
differential capacitance is formed for detecting output signals. According to the invention, a special modality of a round disc, a wheel
spoke or a
honeycomb shape is adopted in the gyroscope oscillator, the detection is driven by
piezoelectricity effect, and the detection is carried out by using
capacitance. Therefore, angular velocities parallel to the upper and the lower surfaces of the gyroscope oscillator can be sensitively detected. According to the invention, with an MEMS micromachining technology, two-axis detection can be realized, the
machining technology is easy to realize, the reliability is high, the
energy consumption is low, the
impact resistance is high, and the gyroscope can operate well in severe environments.