The invention provides a preparation method and application of a
piezoelectric sensor vibration device based on an h-BN / GaN
heterojunction, and belongs to the technical field of piezoelectric sensors, a third-generation
semiconductor material
gallium nitride is used as a core material of a novel
piezoelectric sensor, and the
piezoelectric sensor vibration device based on the h-BN / GaN
heterojunction is prepared by using piezoelectric characteristics determined by inherent
asymmetry of a GaN
wurtzite crystal structure. The problem of heat temperature failure caused by
Curie temperature limitation of conventional piezoelectric materials such as piezoelectric ceramics is solved, and meanwhile, the technical problems that a traditional piezoelectric sensor is narrow in
frequency response range, poor in temperature stability and slow in dynamic response are solved by utilizing the characteristics of high forbidden bandwidth,
high electron mobility and high
temperature resistance of GaN. On the basis of a GaN material, an h-BN / GaN heterostructure is constructed by means of
hexagonal boron nitride (h-BN), the piezoelectric effect of a
strain engineering and interface collaborative polarization enhancement device is utilized, the technical problem that the
piezoelectric coefficient is low when GaN is singly used for preparing a piezoelectric sensor is solved, meanwhile, the two-dimensional structural characteristic of the h-BN is utilized, the flexible piezoelectric
detector can be prepared in cooperation with the GaN, and the flexible piezoelectric sensor has the advantages of being simple in structure, low in cost and the like. And light-weight and thin-film device design is realized.