Digital closed loop servo circuit applied to quartz flexible accelerometer
An accelerometer and flexible technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve problems such as loss of precision, achieve good system errors, eliminate errors, and achieve compensation effects
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[0022] The technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0023] refer to Figure 5 The digital closed-loop servo circuit of the quartz flexible accelerometer of the present invention includes a differential capacitance detection circuit, a pre-filter amplifier circuit, an A / D conversion circuit, a digital signal processing circuit, a triangular wave generation circuit, a D / A conversion circuit, and a drive amplifier circuit . Among them, the model parameters and detailed schematic diagrams of the pre-filter amplifier circuit, A / D conversion circuit, triangular wave generation circuit, D / A conversion circuit, and drive amplifier circuit are shown in Figure 7 As shown, the detailed schematic diagram of the differential capacitance detection circuit is shown in Figure 4 As shown, the signal processing flow chart of the digital signal processing circuit is as follows Ima...
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