Trimmer for trimming polishing pad

A dressing device and polishing pad technology, which is applied to surface polishing machine tools, grinding devices, grinding/polishing equipment, etc., can solve the problems of heavy cantilever load and affecting the running stability of the swing motor, and achieve weight reduction, compact structure, The effect of smooth transmission

Active Publication Date: 2010-01-13
HWATSING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such an arrangement is prone to produce many uncertain factors. For example, the hydraulic device not only changes the downforce when adjusting the pressure, but also affects the smoothness of the swing mot

Method used

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  • Trimmer for trimming polishing pad

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Embodiment Construction

[0014] The present invention provides a dressing device for dressing the polishing surface of a polishing pad, and the present invention will be further described below through the description of drawings and specific embodiments.

[0015] figure 1 It is a structural schematic diagram of the present invention. The output end of the rotation motor 8 is connected with the second synchronous pulley 6, and drives the first synchronous pulley 5 to rotate through the synchronous belt 7. The center of the first synchronous pulley 5 is successively installed with the rotatable part 3, the universal joint 2 and the final execution Part 1, the final executive part 1 is driven to rotate by the rotation motor 8 through the synchronous belt 7, and the universal joint 2 transmits torque and down force while realizing the self-adaptation of the dressing disc 14 to ensure that the dressing disc 14 is parallel to the polishing pad. The rotation motor 8 directly drives the synchronous belt pul...

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Abstract

The invention discloses a trimmer for trimming the polished surface of a polishing pad in the chemical-mechanical polishing process, relating to the technical field of polishing equipment. A final performer is driven to rotate by a rotating motor through a synchronous belt, and a swing motor drives a movable cantilever to pull the final performer to swing forwards and backwards radially on the polished surface. A universal joint arranged between a rotatable part and the performer realizes the self-adaptation of a trimming disc besides delivering the torque moment and the lower pressure and ensures that the trimming disc is parallel to the polishing pad. The trimmer is forced to jiggle up and down by adjusting the pressure of a cylinder so as to adapt to the jumpiness of the polishing pad in rotation and keep the lower pressure within a certain range, and the trimming disc is lifted up to be away from the polishing pad when not in trimming. With the advantages of compact structure as well as high smoothness and reliability, the trimmer for trimming polishing pads can be widely applied to precision polishing equipment.

Description

technical field [0001] This patent relates to the technical field of polishing equipment, in particular to a dressing device for dressing the polishing surface of a polishing pad during chemical mechanical polishing. Background technique [0002] Semiconductor device manufacturing often includes one or more polishing or planarization steps following material deposition on the device side of the base. The polishing surface of the polishing pad must often be dressed or "roughened" to maintain the efficiency of polishing or removal of deposited species from the substrate surface. To this end, several devices have been developed for abrading the polishing surface of a polishing pad with a coarse-grained dressing material. [0003] The conditioning head may be adapted to generate or transmit torque to the final effector for rotating the final effector and conditioning disc during polishing pad conditioning. In addition, a certain downforce may be generated, for example, at the ...

Claims

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Application Information

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IPC IPC(8): B24B53/14B24B37/04B24B29/02H01L21/02B24B53/017
Inventor 路新春彭静赵德文
Owner HWATSING TECH
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