Trimmer for trimming polishing pad

Abstract

The invention discloses a trimmer for trimming the polished surface of a polishing pad in the chemical-mechanical polishing process, relating to the technical field of polishing equipment. A final performer is driven to rotate by a rotating motor through a synchronous belt, and a swing motor drives a movable cantilever to pull the final performer to swing forwards and backwards radially on the polished surface. A universal joint arranged between a rotatable part and the performer realizes the self-adaptation of a trimming disc besides delivering the torque moment and the lower pressure and ensures that the trimming disc is parallel to the polishing pad. The trimmer is forced to jiggle up and down by adjusting the pressure of a cylinder so as to adapt to the jumpiness of the polishing pad in rotation and keep the lower pressure within a certain range, and the trimming disc is lifted up to be away from the polishing pad when not in trimming. With the advantages of compact structure as well as high smoothness and reliability, the trimmer for trimming polishing pads can be widely applied to precision polishing equipment.

Description

technical field [0001] This patent relates to the technical field of polishing equipment, in particular to a dressing device for dressing the polishing surface of a polishing pad during chemical mechanical polishing. Background technique [0002] Semiconductor device manufacturing often includes one or more polishing or planarization steps following material deposition on the device side of the base. The polishing surface of the polishing pad must often be dressed or "roughened" to maintain the efficiency of polishing or removal of deposited species from the substrate surface. To this end, several devices have been developed for abrading the polishing surface of a polishing pad with a coarse-grained dressing material. [0003] The conditioning head may be adapted to generate or transmit torque to the final effector for rotating the final effector and conditioning disc during polishing pad conditioning. In addition, a certain downforce may be generated, for example, at the ...

AI Technical Summary

Problems solved by technology

Such an arrangement is prone to produce many uncertain factors. For example, the hydraulic device not only changes the downforce when adjusting the pressure, but also affects the smoothness of the swing motor itself; The vibration itself has a significant impact on the running stability of the actuator, and installing a motor at the other end of the cantilever fulcrum will inevitably make the cantilever heavy

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