Love wave gas sensor

A gas sensor and acoustic wave technology, which is applied in the analysis of solids using sonic/ultrasonic/infrasonic waves, can solve the problems of poor stability and limit the application range of surface acoustic wave sensors, and achieve the effect of both sensitivity and stability.

Inactive Publication Date: 2010-02-10
INST OF ACOUSTICS CHINESE ACAD OF SCI
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Problems solved by technology

However, during the experiment, it was found that in this kind of sensor device, the formation of organic chemical sensitive film is easily affected by many factors such as temperature, humidity, oxidation, static electricity and pressure, and the stability

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  • Love wave gas sensor
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Embodiment Construction

[0019] The Love wave gas sensor using semiconductor gas sensitive material of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0020] figure 1 It is the plan view of the first embodiment of the Love wave sensor adopting semiconductor type gas sensitive material of the present invention, figure 2 It is the Love wave sensor adopting the semiconductor gas sensitive material of the present invention figure 1 A cross-sectional view of the embodiment shown. Such as figure 1 as well as figure 2 As shown, the Love wave sensor adopting semiconductor type gas sensitive material of the present invention comprises: piezoelectric substrate 1, the input interdigital transducer 3 and the output interdigital transducer 4 deposited on the piezoelectric substrate 1 surface , the waveguide layer 5 covering the input IDT 3 and the output IDT 4, and the sensitive film 2 covering the waveguide layer 5, wherein th...

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Abstract

The invention provides a love wave gas sensor which comprises a piezoelectric substrate, an input interdigital transducer, an output interdigital transducer and sensitive films, wherein the input interdigital transducer and the output interdigital transducer are deposited on the surface of the piezoelectric substrate, the sensitive films are covered on the piezoelectric substrate, the input interdigital transducer and the output interdigital transducer, the sensitive films are semiconductor-type gas sensitive material layers, the input interdigital transducer excites and spreads sound waves inthe piezoelectric substrate, the output interdigital transducer is used for receiving the sound waves, the characteristics of the sound waves can be changed after a loaded measured object reacts withthe sensitive films, and the characteristic conclusion about the measured object is acquired through detecting the changes. The love wave gas sensor can overcome the defect of lower detection lower limit of an existing semiconductor-type sensor, improves the performance of the sensor from the aspect of detection means, and realizes a gas detection function with high sensitivity and stability by combining the structure of a love wave sensor with an existing semiconductor-type solid gas sensitive film technology.

Description

technical field [0001] The invention relates to a Love-type acoustic wave (abbreviated as Love-wave) sensor, in particular to a Love-wave gas sensor using a semiconductor-type gas-sensitive material. Background technique [0002] Since 1964, the first gas sensor was developed by Wickens and Hatman using the oxidation-reduction reaction of gas on the electrode. In 1982, Persaud of the University of Warwick in the United Kingdom proposed the structure of using a gas sensor to simulate the animal olfactory system. Sensors develop rapidly and are used in various occasions. Gas sensors mainly include semiconductor sensors (resistive and non-resistive) (Sensor World, 2001, "Research Progress of Several Common Gas Sensors"). Existing gas detection devices mainly use the changes in resistance, capacitance and current caused by the contact between the gas-sensitive film and the gas to be measured to determine the gas concentration. At the same time, there are a lot of researches on...

Claims

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Application Information

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IPC IPC(8): G01N29/12
Inventor 李红浪刘久玲程利娜何世堂
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
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