Love wave gas sensor

A gas sensor and acoustic wave technology, which is applied in the analysis of solids using sonic/ultrasonic/infrasonic waves, can solve the problems of poor stability and limit the application range of surface acoustic wave sensors, and achieve the effect of both sensitivity and stability.
CN101644696AInactive Publication Date: 2010-02-10INST OF ACOUSTICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
INST OF ACOUSTICS CHINESE ACAD OF SCI
Publication Date
2010-02-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a love wave gas sensor which comprises a piezoelectric substrate, an input interdigital transducer, an output interdigital transducer and sensitive films, wherein the input interdigital transducer and the output interdigital transducer are deposited on the surface of the piezoelectric substrate, the sensitive films are covered on the piezoelectric substrate, the input interdigital transducer and the output interdigital transducer, the sensitive films are semiconductor-type gas sensitive material layers, the input interdigital transducer excites and spreads sound waves inthe piezoelectric substrate, the output interdigital transducer is used for receiving the sound waves, the characteristics of the sound waves can be changed after a loaded measured object reacts withthe sensitive films, and the characteristic conclusion about the measured object is acquired through detecting the changes. The love wave gas sensor can overcome the defect of lower detection lower limit of an existing semiconductor-type sensor, improves the performance of the sensor from the aspect of detection means, and realizes a gas detection function with high sensitivity and stability by combining the structure of a love wave sensor with an existing semiconductor-type solid gas sensitive film technology.
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Description

technical field

[0001] The invention relates to a Love-type acoustic wave (abbreviated as Love-wave) sensor, in particular to a Love-wave gas sensor using a semiconductor-type gas-sensitive material. Background technique

[0002] Since 1964, the first gas sensor was developed by Wickens and Hatman using the oxidation-reduction reaction of gas on the electrode. In 1982, Persaud of the University of Warwick in the United Kingdom proposed the structure of using a gas sensor to simulate the animal olfactory system. Sensors develop rapidly and are used in various occasions. Gas sensors mainly include semiconductor sensors (resistive and non-resistive) (Sensor World, 2001, "Research Progress of Several Common Gas Sensors"). Existing gas detection devices mainly use the changes in resistance, capacitance and current caused by the contact between the gas-sensitive film and the gas to be measured to determine the gas concentration. At the same time, there are a lot of researches on...

Claims

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