Electromagnet driven gyroscope based on nanometer film quantum tunneling effect

A quantum tunneling and electromagnetic drive technology, which is applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, piezoelectric/electrostrictive/magnetostrictive devices, etc., to achieve simple structure , low power consumption requirements, easy processing effect

Inactive Publication Date: 2010-02-24
ZHONGBEI UNIV
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Problems solved by technology

[0004] In order to solve the problem that the driving mode and detection mode used in the existing micromechanical gyroscope and the structure corresponding to the driving and detection mode limit the further improvement of the performance parameters of the gyroscope, a nano-film quantum tunneling effect is provided. Electromagnetically Driven Gyroscope

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  • Electromagnet driven gyroscope based on nanometer film quantum tunneling effect
  • Electromagnet driven gyroscope based on nanometer film quantum tunneling effect
  • Electromagnet driven gyroscope based on nanometer film quantum tunneling effect

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Embodiment Construction

[0019] The electromagnetically driven gyroscope based on the nano-film quantum tunneling effect includes a carrier plate 1, a gyro tube core 2 welded and fixed on the central area of ​​the carrier plate 1, and a permanent magnet 3 is embedded in the central area of ​​the carrier plate 1, and the gyro tube core 2 A gyro-sensitive mechanism is packaged; the gyro-sensitive mechanism includes a support frame 4, a glass substrate 5 bonded and fixed to the lower surface of the support frame 4, a mass block 6 erected in the center of the support frame 4 through a composite beam, and the mass The four-quadrant area divided by the X-axis centerline and the Y-axis centerline on the block 6 is provided with beam placement grooves 7 for setting composite beams, and the beam placement grooves 7 in adjacent quadrants on the mass block 6 are The dividing line between adjacent quadrants - the X-axis centerline or the Y-axis centerline of the quality block 6 is arranged symmetrically; the compo...

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Abstract

The invention relates to a micro-mechanical gyroscope, in particular to an electromagnet driven gyroscope based on a nanometer film quantum tunneling effect, solving the problem of the existing micro-mechanical gyroscope that an applied drive mode, an applied detection mode and the structures corresponding to the drive mode and the detection mode limit the performance of the gyroscope to be further improved. The gyroscope comprises a carrier plate embedded with a permanent magnet and a gyroscope tube core, wherein the gyroscope tube core is internally enveloped with a gyroscope sensitive mechanism which comprises a support frame body, a glass base plate, a composite beam and a mass block; the composite beam is formed by a detection beam and pentacle-shaped drive beams symmetrically positioned at the two sides of the detection beam; the connection place between the detection beam and support frame body is provided with a nanometer film quantum tunneling apparatus; the mass block is provided with a feedback lead wire and a drive lead wire; a connection lead wire at the two ends of the feedback lead wire and the drive lead wire, which is positioned along the composite beam, is connected with a lead wire pad corresponding to the support frame body. The gyroscope has simple, rescannable and compact structure, is suitable for microminiaturization, and greatly improves performance parameters such as sensitivity, and the like, compared with the existing micro gyroscope.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to an electromagnetically driven gyroscope based on the nano-membrane quantum tunneling effect. Background technique [0002] The micromechanical gyroscope is an important part of the micromechanical inertial instrument, which is mainly used to measure the angular velocity or angular displacement of the object relative to the inertial space. At present, the most commonly used drive method for micromachined gyroscopes is the electrostatic drive method, which is realized by using the voltage difference between the drive components. The magnitude of the electrostatic driving force is related to the spacing of the driving components and the magnitude of the driving voltage, that is, the smaller the spacing of the driving components and the greater the driving voltage, the greater the electrostatic driving force generated. In the driving components that require a large driving force, due t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56B81B7/02
Inventor 刘俊杜康李孟委石云波王瑞荣
Owner ZHONGBEI UNIV
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