Excimer lamp

A technology of excimer lamps and discharge vessels, which is applied in the field of excimer lamps, can solve problems such as damage to the discharge vessel 61, achieve the effects of preventing damage to the discharge vessel, reducing damage such as ultraviolet strain, and reducing ultraviolet strain

Active Publication Date: 2013-07-17
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the accumulated strain caused by the stress concentration makes the edge portions 64a, 64b, 64c, and 64d the starting point of damage, causing a problem that the discharge vessel 61 is broken.

Method used

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  • Excimer lamp
  • Excimer lamp
  • Excimer lamp

Examples

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Embodiment Construction

[0023] figure 1 It is an explanatory sectional view showing a schematic configuration of an example of the excimer lamp 10 of the present invention, figure 1 (a) is a cross-sectional view showing a section along the longitudinal direction of the discharge vessel 11, figure 1 (b) means figure 1 (a) A-A line sectional view.

[0024] The excimer lamp 10 is equipped with a discharge vessel 11 having a rectangular cross-section and a hollow elongated discharge vessel 11 whose both ends are hermetically sealed and a discharge space S is formed inside. There is xenon. Here, the enclosing amount of xenon gas is such that the pressure is within a range of, for example, 10 to 60 kPa.

[0025] The discharge vessel 11 is made of silica glass such as synthetic quartz glass that transmits vacuum ultraviolet light well, and also functions as a dielectric.

[0026] In discharge vessel 11, long side surfaces 12a, 12b made of long plate glass are arranged to face each other, and short ...

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Abstract

Provided is an excimer lamp having a discharge container with a tube of rectangular section shape to prevent the edges from becoming the damage starting points and causing breakage of the discharge container. In the discharge space (S) of the discharge container (11), the excimer lamp (10) causing excimer discharge is parallel to the section taken from the terminals (14a, 14b), and the long edge sides (12a, 12b) of the discharge container (11) are corresponding to the edges (16a, 16b, 16c, 16d) of the long edge sides (12a, 12b) and the short edge sides (13a, 13b). The middle parts (121a, 121b) of the long edge sides (12a, 12b) are formed by inwardly bending toward the discharge space (S). A UV reflection film (20) is formed on the surface of the discharge space (S) exposed to the discharge container (11), and the thickness of the UV reflection film (20) at the edge is thicker than that at the central part.

Description

technical field [0001] The present invention relates to an excimer lamp, in which a discharge gas is excited through a pair of electrodes facing a discharge vessel made of silica glass, and the silica glass forming the discharge vessel between the pair of electrodes, An excimer discharge occurs inside the capacitor. Background technique [0002] In recent years, the following technology has been developed and put into practical use: irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass and other materials, thereby detoxifying Treatment of the object to be processed, such as cleaning treatment technology to remove organic pollutants attached to the surface of the object to be processed, or oxide film formation treatment technology to form an oxide film on the surface of the object to be processed. [0003] Among these devices, there is known an excimer lamp that uses light as a light source for irradiating va...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J65/00H01J61/33H01J61/35
CPCH01J5/50H01J9/247H01J61/305H01J61/35H01J65/046
Inventor 藤泽繁树平石隆之
Owner USHIO DENKI KK
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