Metal system for testing outgassing property of low-temperature material

Abstract

The invention relates to a metal system for testing the outgassing property of low-temperature material, which belongs to the field of low-temperature materials. The system consists of a sample chamber, a capacitor gauge, a micro adjusting valve, a metal hose, a high vacuum angle valve, a liquid nitrogen cold trap, a mass spectrometer, an inserting plate valve, a molecular valve and a mechanical pump. A vacuum pumping system consisting of the mechanical pump and the molecular pump vacuumizes samples in the sample chamber, and the liquid nitrogen cold trap performs low-temperature absorption on oil steam generated by the system. When the pressure of the sample chamber is pumped to 1*10<-3> Pa, the high-vacuum angle valve and the inserting valve are closed, the capacitor is used for testing the changes of the pressure in the sample chamber in the specified time, and then the outgassing rate of the sample is calculated. After the outgassing rate test is finished, the micro adjusting valve is opened, the discharged gas of the sample is introduced into the mass spectrometer by the metal hose, the outgassing component of the sample is analyzed by the mass spectrometer, and then the outgassing component of the sample is determined. The system enhances the reliability and he accuracy of the system, and has reliable testing result.

Description

technical field

[0001] The invention relates to a metal system for testing the outgassing performance of low-temperature materials, belonging to the field of low-temperature materials. Background technique

[0002] At present, there are two methods for testing the outgassing performance of materials: the first is the dynamic method, also known as the flow rate method, that is, in the constant temperature sample chamber, the pressure of the material at both ends of the sample chamber is measured with time, and then the outgassing performance of the sample is determined. The test method is characterized in that the sample moves back and forth at both ends of the sample chamber, and the sample is in a dynamic evacuation state during the test; the second is the static method, also known as the constant volume method, that is, the temperature, mass and volume of the air outlet space of the fixed sample Under certain conditions, the method of measuring the pressure change of the f...

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