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Improved grinding wheel spindle using air bearing

An air bearing and spindle technology, which is applied to the parts of grinding machine tools, grinding machines, metal processing equipment, etc., can solve the problems that the accuracy requirements cannot meet the requirements for the use of the grinding wheel spindle of wafer grinding machines, and the noise is high.

Inactive Publication Date: 2010-07-28
WUXI MACHINETOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing electric spindles in China are mainly supported by mechanical bearings, which cause high-speed rotation vibration and high noise, and their precision requirements cannot meet the requirements for the use of wafer grinder grinding wheel spindles.

Method used

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  • Improved grinding wheel spindle using air bearing
  • Improved grinding wheel spindle using air bearing

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Embodiment Construction

[0014] see figure 1 , figure 2 , image 3 , The present invention includes the rotor spindle 1, the spindle housing 2, the spindle flange 3, the motor 4, the resolver 5, the spindle rear cover 6, the spindle front cover 7, the cooling water connector 8, and the air bearing spindle 9 is sleeved on the spindle housing 2 and the cavity formed by the rotor main shaft 1, radial orifices 10 are evenly distributed on the outer surface of the air bearing main shaft 9, and each radial orifice 10 passes through the air path 21 of the air bearing main shaft 9 and the main shaft housing The air passage 22 inside the body 2 communicates with each other, and the main shaft housing 2 is provided with an air inlet 11 and an air outlet 12 communicating with the radial orifice 10.

[0015] The upper round end of the spindle flange 3 is equipped with a bearing sleeve 13, the lower round end is equipped with an upper thrust bearing 14, a thrust bearing air cover 15 is installed between the upper th...

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PUM

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Abstract

The invention provides an improved grinding wheel spindle using an air bearing, which can greatly increase precision and simultaneity reduce vibration and noise. The grinding wheel spindle comprises a rotator spindle, a spindle case, a spindle flange, a motor, a rotation transformer, a spindle back cover, a spindle front cover and a cooling-water joint, and is characterized in that the spindle of the air bearing is sleeved in the cavity formed by the spindle case and the rotator spindle, the inner round face of the bearing sleeve is evenly provided with axial throttles which are communicated with the air paths in the spindle case by the spindle of the air bearing, and the spindle case is provided with an air inlet and an air outlet communicated with the axial throttles.

Description

(1) Technical field [0001] The invention relates to the field of semiconductor wafer manufacturing equipment, in particular to an improved grinding wheel spindle using air bearings. (2) Background technology [0002] The existing domestic electric spindles are mainly supported by mechanical bearings, which have high-speed rotation vibration and high noise. At the same time, their accuracy requirements cannot meet the requirements of the use of wafer grinder grinding wheel spindles. (3) Summary of the invention [0003] In view of the above problems, the present invention provides an improved grinding wheel spindle using air bearings, which can greatly improve the accuracy and reduce vibration and noise at the same time. [0004] The technical solution is as follows: it includes a rotor main shaft, a main shaft housing, a main shaft flange, a motor, a resolver, a main shaft rear cover, a main main shaft front cover, and a cooling water connector, and is characterized in that the air ...

Claims

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Application Information

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IPC IPC(8): B24B19/22B24B41/04
Inventor 蒋书运储湘华朱金虎
Owner WUXI MACHINETOOL
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