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Method for removing dust and ion with non-dust cloth

A dust-free cloth and ion technology, which is applied in the field of dust removal and ion cleaning, can solve the problems that cannot meet the requirements of dust removal and ion removal, threaten the safety of equipment, damage and other problems, and achieve cleanliness and safety protection, strong decontamination ability, low cost effect

Active Publication Date: 2010-07-28
GUANGDONG SUOREC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This cleaning method is acceptable for ordinary and easy-to-clean polyester cloth, but it is difficult to apply to the more commonly used microfiber polyester-nylon composite dust-free cloth, and it cannot meet the requirements of dust removal and ion removal. Wiping electronic optical medical semiconductor equipment with a clean dust-free cloth will cause damage or even damage to it, seriously threatening the safety of related equipment

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] Embodiment 1, the dust-free dust removal and ion removal method includes the following steps:

[0016] 1) Heat pure water with a resistance value of 18.2MΩ to 50°C, and add degreasing agent, of course, it can also be dedusting agent;

[0017] 2), put the used dust-free cloth into the above-mentioned heated pure water and soak for 30 minutes, wherein the bath ratio of dust-free cloth to pure water is 1:40;

[0018] 3) Take the dust-free cloth out of the hot water, and wash it once with pure water at room temperature with a resistance value of 16MΩ and a bath ratio of 1:10;

[0019] 4), transfer the dust-free cloth obtained in step 3) to a cleaning machine for cleaning, and clean for 3 cycles according to the following process:

[0020] a. Adjust the bath ratio of the washing machine to 1:40;

[0021] b. Use the standard cleaning method to clean for 5 minutes;

[0022] c. Dehydrate the cleaned dust-free cloth at high speed.

[0023] 5), transfer the dust-free cloth in...

Embodiment 2

[0024] Embodiment 2, the dust-free dust removal and ion removal method includes the following steps:

[0025] 1) Heat pure water with a resistance value of 17MΩ to 80°C, and add dust remover, of course, degreasing agent;

[0026] 2), put the used dust-free cloth into the above-mentioned heated pure water and soak for 40 minutes, wherein the bath ratio of dust-free cloth to pure water is 1:30;

[0027] 3) Remove the dust-free cloth from the aforementioned hot water, and wash it once with normal temperature pure water with a resistance value of 17 MΩ and a bath ratio of 1:10;

[0028] Step 4) and step 5) are identical with embodiment 1.

Embodiment 3

[0029] Embodiment 3, the method for dust removal and ion removal by dust-free cloth, comprises the following steps:

[0030] 1) Heat pure water with a resistance value of 16MΩ to 100°C, and add a dedusting agent during the process, of course, it can also be a degreasing agent;

[0031] 2), put the used dust-free cloth into the above-mentioned heated pure water and soak for 60 minutes, wherein the bath ratio of dust-free cloth to pure water is 1:10;

[0032] 3) Remove the dust-free cloth from the aforementioned hot water, and wash it once with normal temperature pure water with a resistance value of 18.2 MΩ and a bath ratio of 1:10;

[0033] Step 4) and step 5) are identical with embodiment 1.

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Abstract

The invention discloses a method for removing dust and ions with non-dust cloth, which comprises the following steps: 1) preparing hot pure water of 50-100 DEG C and 16-18.2M Omega; 2) placing the non-dust cloth into the hot pure water for 30-60 minutes with the bath ratio of 1:10-1:40; 3) rinsing for once with room-temperature pure water of 16-18M Omega with the bath ratio of 1:10; 4) cleaning for three times at the room temperature with the bath ratio of 1:40 and then carrying out high-speed drying for three times; and 5) transferring the non-dust cloth after being cleaned to a drying box, thereby completing the flow of removing dust and ions. Due to the adoption of the heat extraction cleaning method, the invention effectively solves the problem of removing the contaminating ions on the ultra-fine fiber non-dust cloth, and can effectively remove contaminating particles and relevant ions on the surface of the non-dust cloth, and protect the cleanness and safety of relevant equipment to the largest extent. Compared with the traditional cleaning method, the method has the advantages of simple operation, high decontamination capability and low cost.

Description

technical field [0001] The invention relates to a cleaning treatment method for dust removal and ion removal, in particular to a method for removing polluted dust particles and ions on a dust-free cloth. Background technique [0002] Dust-free cloth is a kind of chemical cloth widely used in electronic optical medical semiconductor equipment. It has high requirements on its own cleanliness and absorbency. To achieve the "dust-free" effect, it is necessary to reduce product dust particles as much as possible release, corrosive ion release, and non-volatile residue release. At present, the cleaning method of ultra-fine fiber dust-free cloth is to wash the dust-free cloth with tap water, and then directly wash it with ultrapure water, or perform three-stage progressive cleaning with tap water, RO water, and ultrapure water. This cleaning method is acceptable for ordinary and easy-to-clean polyester cloth, but it is difficult to apply to the more commonly used microfiber polyes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): D06L1/16D06M10/00
Inventor 汪永红
Owner GUANGDONG SUOREC TECH
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