Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit
A technology of temperature compensation circuit and micro-mechanical gyroscope, which is applied to thermometers, thermometers, and measuring devices that use directly heat-sensitive electric/magnetic elements, and can solve the problem of compensation result deviation, poor real-time performance, and angular rate measured by quartz micro-mechanical gyroscopes errors and other problems, to achieve the effect of improving precision and accuracy
Inactive Publication Date: 2010-08-04
CHINA ELECTRONICS TECH GRP NO 26 RES INST
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Therefore, the real-time performance of compensation based on this temperature information is poor
In practical applications, the ambient temperature changes at any time, and neither the direction nor the rate of change can be determined in advance. When the rate of temperature change is fast, due to the hysteresis effect, the compensation result will deviate seriously, resulting in the angular rate measured by the quartz micromechanical gyroscope. large errors or even wrong judgments
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[0019] The basic working principle of the oscillator circuit is as follows:
[0020] The driving tuning fork of the sensitive device leads to two electrodes, which are the driving end and the feedback end. figure 2 Ud is the driving signal of the oscillation circuit, which is connected to the driving end to drive the tuning fork to vibrate. Uf is the feedback signal obtained after the output of the feedback terminal passes through the buffer. After the feedback signal is connected to the amplitude-controlled amplifier, the circuit satisfies the oscillation condition and drives the tuning fork to vibrate at its natural frequency.
[0021] In the normal operation of the circuit, when Uf changes, the error signal Ve is generated through the detection, comparison and low-pass filter circuits, so that the output voltage Vk of the amplitude-controlled voltage generator changes in the same direction as the error signal. Vk reversely controls the amplitude control amplifier, change...
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The invention relates to a method for measuring the temperature of sensitive devices of quartz micro-machined gyroscopes and a temperature compensation circuit. The tuning fork temperature T is obtained by measuring the output voltage Vk of an amplitude control voltage generator according to a mathematical relationship Vk=-aT+b. Based on the measurement method, the temperature compensation circuit can acquire timely and accurate tuning fork temperature signals by only arranging a signal conditioning circuit between the output terminal of the amplitude control voltage generator and the input terminal of the temperature compensation circuit. The actual tuning fork temperature information is acquired by utilizing the temperature characteristics of a quartz tuning fork per se. Compared with the traditional method for testing a temperature sensor, the real-time and accuracy of the temperature information of the method are improved greatly. The temperature measurement circuit is combined with correct compensating means to compensate the temperature of the quartz micro-machined gyroscopes, so the accuracy of the gyroscopes in a complex temperature environment can be improved substantially.
Description
technical field [0001] The invention relates to a sensitive device, which is a core component of a quartz micromechanical gyroscope, and specifically refers to a temperature measurement method for the sensitive device. The method can provide accurate temperature information for a temperature compensation circuit of a quartz micromechanical gyroscope. At the same time, a quartz micromachined gyroscope temperature compensation circuit is designed based on this method. Background technique [0002] Quartz micromechanical gyroscope has the characteristics of small size, light weight, high reliability, and is suitable for mass production. It can be used in many systems that need to measure angular velocity, and has broad application prospects and markets. Since the ambient temperature has a certain influence on its zero voltage, scale factor and other technical indicators, it is necessary to eliminate or weaken the temperature error through temperature compensation measures in en...
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IPC IPC(8): G01K7/22
Inventor 朱振忠张锐苏永川王清亮李世国蒋昭兴
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST