Unit for supporting a substrate and apparatus for processing a substrate having the same
A support unit and base plate technology, applied in support structure installation, electrical components, cooling/ventilation/heating transformation, etc., can solve the problems of thermal deformation of the base 20 and support part 30, metal impurity contamination of the base plate S, vacuum leakage, etc.
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[0037] Various embodiments will be described in more detail below with reference to the accompanying drawings that illustrate the embodiments. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In these drawings, the size and relative sizes of layers and regions may be exaggerated for clarity.
[0038] It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or directly connected to the other element or layer. Layers, or the presence of intervening elements or layers. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers p...
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